High Vacuum Angle Valve

181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

MGP

400st 140 140 161 161 125 to 200st 118 118 134 134 75 to 124st 98 98 114 114 25 to 74st 21.5 15 21 16 75 to 124st 38.5 32 42 37 125 to 200st 58.5 52 62 57 201 to 400st 80.5 74 89 84 25 to 74st 81 81 93 93 32 40 50 63 32 40 50 63 80 100 A E Bore size (mm) 25 to 49st 109.5 121 50 to 74st 130 147 75 to 200st 160 180 201 to 400st 193 203 25 to 49st 13 5 50 to 74st 33.5 31 75 to 200st 63.5 64

Hydraulic Filters

(50) P AE E (Rc) K L-type block R Q Weight (kg)* d K W Y AE (mm) (75) (50) W J Port size (mm) W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 62 62 62 65 65 65 65 65 9 9 9 9 9 9 9 9 70 70 70 85 85 85 105 105 47 47 47 50 50 50 50 50 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 Weight (kg)* E J P Q Weight (kg)* E 69 69 74

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

Rotary Table/Rack & Pinion Style Series MSQ

25 Size: 10 to 50 Size: 70 to 200 Carbon steel 26 Anodized Anodized Chromated NBR Brass NBR Stainless steel 27 28 29 30 31 Size: 70 to 200 only Size: 70 to 200 only Replacement parts Description Size 10 P523010-5 20 P523020-5 30 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P391070-5 Seal kit No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn

MY1

PP 24 37.5 53 69 V V 23.5 25 60 70 QQ 27 29.5 35 38 WW 22.5 28 25 28 TT 22.5 27 30 40 XX 47 56 90 120 UU 23.5 29 40 48 RR 34 45.5 61 75 SS 10 13.5 15 20 Model MY1B 50G MY1B 63G MY1B 80G MY1B100G "P" indicates cylinder supply ports.

MY1

52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5 46 220 Rc 1/16 Rc 1/8 80 35 264 17 51 16 23 4 16 16 16 MY1B32 70 10 10 19 32 48 55 280 Rc 1/16 Rc 1/4 100

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

75 Series VZ5000 Option/Standard Manifold Individual EXH Spacer Assembly Installation of the VZ500 Valve on the VZ5000 Manifold Combinations of Solenoid Valve, Manifold Gasket and Manifold Base DXT199-29-2A Use of an adaptor plate makes it possible to mount Series VZ500 on the manifold base of Series VZ5000.

Modular F.R.L. Units

70 U 2.3 2.3 2.3 2.3 V 28 30 35 34 B 104.9 156.8 186.9 188.9 A 40 53 70 75 40 50 75 75 30 41 50 50 AFM20-A/AFD20-A AFM30-A/AFD30-A AFM40-A/AFD40-A AFM40-06-A/AFD40-06-A Model Semi-standard specifications With barb fitting With drain guide B 123.6 155.6 157.6 B 91.4 121.9 153.9 155.9 AFM20-A/AFD20-A AFM30-A/AFD30-A AFM40-A/AFD40-A AFM40-06-A/AFD40-06-A 42 Modular Type Regulators Series AR

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D

Compact Cylinder with Lock Series CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 25% 10 10 Duty ratio: 50% 5000 5000 Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 40 50 60 70 80 0 10 20 30 40 50 Work load [kg] Work load

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

CV/MVGQ

2, 3, 4 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 Different sides CV n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2) n = 2, 4, 6, 8 MVGQ 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides CC 2 Same side 20 + 35 (n 2) n = 2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 +

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36 54 24 35.5 16.5 80 83 58 85 37 48.5 27.5 75-01-A18 75-01-A18 146.5 202 159.5 215 100 125 ZPT HBJ-B01-A22 (Male thread) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 17 M22 x 1.5 Hexagon width across flats 30 8 50 8 Width across flats 19 10 H 70 4 x

Rotary Table/

O-ring Steel balls Size: 70 to 200 only Shock absorber Replacement parts Description Kit no.

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External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154