High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

Aluminum High Vacuum Angle Valve

type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

) 29.6 14.3 115.8 35 x 1 x 10 25 80 A A A A A STATION NO. 5 83.8 116 B A B A 42 36.6 LRUN PW B RATE LERR.

Air Fittings & Tubing

(inch) Fitting size d (inch) (1) Weight (g) D1 D2 L1 L2 A M 9.6 10.4 11.4 13.2 15.2 17.9 21.7 7 8 10 10 12 13.6 17 17 18 19.5 20 22.5 25 28 24.5 25 34 27.5 31.5 35 44.5 14 14.5 23.5 17.5 21 23 34 15 16 16.5 17 18.5 21 22 2.2 2.5 3.5 4.6 6 7 9.6 3 3 7 8 6 19 27 KQ2L01-99 KQ2L03-99 KQ2L05-99 KQ2L07-99 KQ2L09-99 KQ2L11-99 KQ2L13-99 1 8 1 8 5 32 3 16 1 4 5 32 3 16 1 4 5 16 5 16 3 8 1 2 3 8 1

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

to 40, 63 to 100 50 16, 20 25 to 63 16, 20 6, 10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W

CL

5 !6 !7 !8 !

LEC-OM071xx

1 5 Adjustments 5.

AS

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" 2 6, 10, 16, 20 (1) AS1001F AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 2 size added to applicable tubing sizes Metric size (Release button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS3001F

CM2

185 210 17 35 25 72 85 97 110 135 12.5 25 37.5 50 75 149 162 174 187 212 17 35 32 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 19 46 40 Rear flange Built-in One-touch fitting CM2G20SCM220A, #5 SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

CATALOG VC10

VALVE Pressure Differential . . . . . . . . . . . 25 PSI 15 PSI Vacuum. . . . . . . . . . . . . . . . . . . . . . . down to 5 microns down to 5 microns Repair Packs . . . . . . . . . . . . . . . . . . K72TDD (A.C. or D.C.)

Combination Cylinder

CL1 MXQ 40 25 to 500 50, 63 25 to 600 MXF 3.1-49 80, 100 25 to 700 MXW 125, 140 160 Up to 1600 Clamp cylinder with lock Series CLK1 MXP 50 75 100 125 150 MG 32 to 63 3.1-63 MGP MGQ Compact cylinder with lock Series CLQ 20,25 MGG 5 to 50 MGC 5 to 50, 75, 100 3.1-87 32 to 100 MGF MGZ CY Refer to p.5.4-90 for Series CL Made to Order specifications.

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Table of Contents

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

TABLE OF CONTENTS

VALVE Pressure Differential . . . . . . . . . . . 25 PSI 15 PSI Vacuum. . . . . . . . . . . . . . . . . . . . . . . down to 5 microns down to 5 microns Repair Packs . . . . . . . . . . . . . . . . . . K72TDD (A.C. or D.C.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 563 for dimensions with connector cable. 542 5 port solenoid valve Series 10-SYJ7000 3 position closed center / Exhaust center / Pressure center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): 10-SYJ7 23-01 Built-in One-touch fitting: 10-SYJ7 23Air cylinder Rotary actuator Air gripper Directional control

Table of Contents

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

ZP

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

Table of Contents

30 40 0.02 17 36 40 45 5 5 25 times heat transfer area As compared to shell and bare tube, the flower fin tube has 25 times the heat transfer area. 0.03 0.03 0.06 0.002 Air: Compressed air, Cooling water: Industrial water/Fresh water Even heat exchange Sharp edge of flower fin causes air turbulence resulting in even heat exchange and high cooling efficiency. 5 to 100 5 to 200 0.05 to 1.0