CM2

45 40 60 25 40 26 34.5 37.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 12 22 9 13 10 8 40 45 40 60 32 40 26 21 M14 X 1.5 21.5 M32 X 2 44.5 42.5 46.5 22 41 8 7 14 24 10 16 11 11 53 50 53 77 40 32 Dimensions by stroke Boss-cut Built-in One-touch fitting (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore 20 25 32 40 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0.1 MPa 0.1 MPa 100 100 0 0 20 20 40 40 60 60 80 80 Gripping point L (mm) Gripping point L (mm) MHS3-100D MHS3-100D 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa 800 800 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 600 600 0.3 MPa 0.3 MPa 400 0.2 MPa 400 0.2 MPa 0.1 MPa 0.1 MPa 200 200 0 0 20 20 40 40 60 60 80 80 100 100 Gripping point L (mm) Gripping point L (mm)

CHKD/CHKG

JIS Standard Compact Hydraulic Cylinder Compact Hydraulic Cylinder CHKD/CHKG Series CHQ CHK CHK CHN CHM CHS CHKD Series CH2 CHA Related Products DNominal pressure: 10 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 CHKG Series Nominal pressure: 16 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 263 JIS Standard Compact Hydraulic Cylinder 20, 25, 32, 40, 50, 63, 80, 100 CHKD Series

MXQ

-40 MXQ25-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ25-125 MXQ25-125 MXQ25-100 MXQ25-100 MXQ25-75 MXQ25-75 MXQ25-30 MXQ25-30 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-125 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-150 MXQ25-100 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3

Table of Contents

(TPH0806, TPH1075, TPH1209) 20 0 0 20 40 60 80 Operating temperature (C) 15-6-22 1 Clean Tubing: Soft Polyolefin Tubing Series TPS Model/Specifications 20 m bundle 100 m roll K TPS0425 Model TPS0604 TPS0805 TPS1065 TPS1208 O.D.

Square Tube Type Air Cylinder Series MB1

Switch spacers Applicable bore size (mm) 32, 40 50, 63 80, 100 Weight table (kg) BMP1-032 Switch spacer Bore size (mm) 32 80 63 50 40 100 Mounting brackets/Part nos.

Compact Cylinder with Lock Series CLQ

Applicable bore size (mm) 32 to 100 BQ-2 702 g BQ2-012 32 to 100 5 BQP1-050 40 to 100 16 For the auto switch mass, refer to page 1719.

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Valve Mounted Cylinder Double Acting, Single Rod Series CVS1 Lube/Non-lube Type: 40, 50, 63, 80, 100 How to Order Electrical entry RE A B Cylinder stroke (mm) Grommet Conduit terminal DIN terminal DIN terminal

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

C85

the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

C85

the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40

MXS

deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table

Air Slide Table Series MXS

Nil S n MXW Symmetric type MXJ Auto switch Nil Without auto switch (Built-in magnet) Bore size (Stroke (mm)) MXP 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 For the applicable auto switch models, refer to the table below.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

to 40 !

CV/MVGQ

L 50 100 J 1 CV3 Without auto switch 100 L 50 Y7BW J 1 CDV3 With auto switch Bore size 40 50 63 80 100 Number of auto switches 40 mm 50 mm 63 mm 80 mm 100 mm Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

Aluminum High Vacuum Angle Valve

XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface

Compact Cylinder with Air Cushion Series RQ

A RQ 63 8 33.5 30 to 100 72 M FV 80 10 43.5 40 to 100 84.5 CQM 100 12 43.5 40 to 100 99 FT L B + Stroke A + Stroke FX FZ 4 x FD All dimensions but A, L and L1 are identical to those of the rod side flange style.

Electric Slide Tables

LES16-30 LES16-100 0.08 0.30 LES16-75 0.008 LES16-50 0.06 LES16-75 0.20 LES16-50 0.04 LES16-50 0.004 LES16-30 0.10 LES16-75/100 0.02 LES16-30 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.000 0 10 20 30 40 Load [N] Load [N] Load [N] LES25 LES25 LES25 Lr = 100 mm 0.12 0.030 0.60 LES25-150 LES25-150 LES25-30 LES25-125 LES25-125 LES25-50 LES25-100 0.08 0.020 0.40 LES25-75 LES25-75 LES25-75 LES25-