Aluminum High Vacuum Angle Valve XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.
Model (1) Cylinder bore (mm) Opening/Closing stroke (mm) Rotating angle () Mass (g) Action Model 306 90 MRHQ10D 10 4 305 180 593 90 MRHQ16D 16 6 591 180 Double acting 1055 90 MRHQ20D 20 10 1052 180 1561 90 MRHQ25D 25 14 1555 180 MRHQ10S MRHQ10C 307 90 10 4 306 180 MRHQ16S MRHQ16C 594 90 16 6 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 20 10 1057 180 1566 90 MRHQ25S MRHQ25C 25 14 1560 180
MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566
HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 100 100 Facility water: 50F (10C) 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) HEC003 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 1000 1000 Facility water flow rate: 1.3 gpm (5 L/min)
Electric Actuator New New Slider Type High Rigidity RoHS Low-profile/Low center of gravity Height dimension reduced by approx. 31% (Reduced by 28 mm) Series Work load lb (kg) Speed (mm/s) Motor output (W) LEJS40 New New 121 (55) 600 100 LJ1H20 66 (30) (Existing model) 500 100 LJ1H20 90 mm 62 mm LEJS40 Type AC Servo Motor (100/200 W) Size: 40, 63 Ball Screw Drive Series LEJS Max. work load
215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89 100 114 140 180 32 40 50 63 80 100 125 160 1.12-7 Series C92 Accessories
Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It
T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main
(100) 71 (71) 44.5 46 16 Reference dimensions after R(PT) thread installation.
Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust
05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1
51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5)
51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5)
Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72
Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80
Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19
Models Note 1) Action Model Cylinder bore (mm) Opening/closing stroke (mm) Rotation angle () Weight g (lb) 306 (0.67) 90 MRHQ10D 4 10 305 (0.67) 180 598 (1.32) 90 MRHQ16D 6 16 596 (1.31) 180 Double acting 1055 (2.32) 90 MRHQ20D 10 20 1052 (2.32) 180 1561(3.44) 90 MRHQ25D 14 25 1555 (3.43) 180 307 (0.68) 90 MRHQ10S MRHQ10C 4 10 306 (0.67) 180 MRHQ16S MRHQ16C 600 (1.32) 90 6 16 598 (1.32) 180
10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/
9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.
50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40