CS1

14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90 115 18.5 20

REA/REB

PA Model HS PW LD M N PB L JK NN P MM HT J High Precision Guide Type REBH Order Made Auto Switches REAL15 REAL20 REAL25 REAL32 REAL40 7.5 70 95 8 45 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 120 5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25

Electric Actuators

10 (LEPS10J) 1.1 1.1 0 350 300 0 50 100 150 Speed [mm/s] 0 350 300 0 50 100 150 Speed [mm/s] 200 250 200 250 Force Conversion Graph (Guide) LEPS6 (Basic) 5.6 Lead 4 (LEPS6K) 4.5 Force [lbf] 3.4 Lead 8 (LEPS6J) 2.2 1.1 0 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 70 10 80 100 50 5 LEPS10 (Basic) LEPS10L

Cylinder with Lock Series CNS

63 35 14 16 155 23 25 30 M14 x 1.5 to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA LD LH LS LT LX LY MM N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85 393 8 100 157.5 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 45 20 110 478 15 31 19 100 433 9 112 180.5

Aluminum High Vacuum Angle Valve

XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.

Rotary Gripper Series MRHQ

Model (1) Cylinder bore (mm) Opening/Closing stroke (mm) Rotating angle () Mass (g) Action Model 306 90 MRHQ10D 10 4 305 180 593 90 MRHQ16D 16 6 591 180 Double acting 1055 90 MRHQ20D 20 10 1052 180 1561 90 MRHQ25D 25 14 1555 180 MRHQ10S MRHQ10C 307 90 10 4 306 180 MRHQ16S MRHQ16C 594 90 16 6 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 20 10 1057 180 1566 90 MRHQ25S MRHQ25C 25 14 1560 180

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

Thermo-con

HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 100 100 Facility water: 50F (10C) 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) HEC003 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 1000 1000 Facility water flow rate: 1.3 gpm (5 L/min)

Electric Actuator

Electric Actuator New New Slider Type High Rigidity RoHS Low-profile/Low center of gravity Height dimension reduced by approx. 31% (Reduced by 28 mm) Series Work load lb (kg) Speed (mm/s) Motor output (W) LEJS40 New New 121 (55) 600 100 LJ1H20 66 (30) (Existing model) 500 100 LJ1H20 90 mm 62 mm LEJS40 Type AC Servo Motor (100/200 W) Size: 40, 63 Ball Screw Drive Series LEJS Max. work load

C92

215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89 100 114 140 180 32 40 50 63 80 100 125 160 1.12-7 Series C92 Accessories

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

Air Fittings & Tubing

(100) 71 (71) 44.5 46 16 Reference dimensions after R(PT) thread installation.

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

CRJ

05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1

C85

51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5)

C85

51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19