C95

63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110 120 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 6-12-8 9 ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 Dimensions: Cylinder Mounting Accessory C, D, E and CR

CP95

190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory C, D, E and CR

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Title not found

DICOM 1 24 VDC Failure Note 3) 9 ALM RA1 N OPC 2 12 MBR RA2 Electromagnetic brake interlock DOCOM 13 S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B phase pulse detector (Differential line driver) 18 LBR Xmmm INP 10 19 LZ Z phase pulse detector (Differential line driver) 20 LZR Xmmm Control common 14 LG

Table of Contents

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

Dedicated Controller

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Electric Actuator with Integrated Guide

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

MXU

M1 M2 M3 Cp, Cy Cr 0.046 0.040 0.049 28.3 5 0.046 0.040 0.049 28.3 10 Caution 0.061 0.053 0.062 31.5 15 MXU6 7.5 1. Do not place your fingers in the clearance between the table and the cylinder tube. Your fingers could get caught between the table and the cylinder tube when the piston rod retracts.

VM

Flame resistant PBT (UL standard V-0) Flame resistant type Cover Flame resistant CR Knob: 2 port valve: Gray 3 port valve: Blue 2/3 port valve: Red (Option) Cam ring POM POM Stem Flame resistant CR (UL standard V-0) For flame resistant type with cover only Spring guide 3(R) Exhaust 3(R) Exhaust Stainless steel Spring NBR Packing, O-ring, Valve 5-8-1 2 Series VHK How to Order 2 VHK R L 02S

VHK

Flame resistant PBT (UL standard V-0) Flame resistant type Cover Flame resistant CR Knob: 2 port valve: Gray 3 port valve: Blue 2/3 port valve: Red (Option) Cam ring POM POM Stem Flame resistant CR (UL standard V-0) For flame resistant type with cover only Spring guide 3(R) Exhaust 3(R) Exhaust Stainless steel Spring NBR Packing, O-ring, Valve 5-8-1 2 Series VHK How to Order 2 VHK R L 02S

Profile Design ISO/VDMA Air Cylinder Series CP95

89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR

Plate Cylinder with Lock Series MLU

DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 7 Plate Cylinder with Lock Series MLU Single knuckle joint Double knuckle joint MM C (R1) Sphere, ball R (R1) MM NDH10 NDH10 A1 A1 NX+0.4 +0.2 E1 NX -0.2 -0.4 NZ E1 U1 U1 L1 NO NL L1 NO NL (mm) Part no.

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Sine Rodless Cylinder Series REBR Direct Mount Type

port P (plug) Operating direction A Piping port P (plug) Operating direction B N H HA Y T CB 8-MM thread depth M HT HP 4-counter bore B Counter bore depth C HP L 4-J Effective thread length E TC X F WP WP GW GP QW PW D 4-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR

3 Position Cylinder Series RZQ

(Example) Bolt M5 x 110l (Two bolts are necessary per cylinder) Rod side mounting Head side mounting CH CR Attached B-type washer D D C 50, 63 Note) Use the attached washer when inserting the bolt from the rod side.

AC Servo Motor Driver (Pulse input type)

CR Clear When this is turned ON, droop pulse is eliminated.

LEC-OM07605CN

DOGDOGOFF Z (CR) () DOG LECSS2T [Pr. PA10] DOGDOG DOG DOG DOG LECSS2T ([Pr. PA09]) 1( ) [Pr. PA10] X1 8 63 8.

Material: S (Body: 316L SS Secondary Remelt; Poppet: Ni-Cr-Mo Alloy; Diaphragm: Ni-Cr-Mo Alloy; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/