CNA

AL A F Q GB K With rod boot LH W W D D e E LY V H1 Width across flats B1 8 f l LT KA Width across flats h + l T Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX C H 4-LD With rod boot on both sides LS + Stroke ZZ + 2 strokes ZZ + 2 l + 2 stroke B Bore size (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

29.5 32 1/2" LQ2R4D-F LQ2R5D-F LQ2R5C-F LQ2R5B-F LQ2R5A-F 29.5 35.5 1/2" 7 26 40 32 14 28 36 36 37 3/4" 17-5-120 25 Series LQ2 High Purity Fluoropolymer Fittings Male Branch Tee: LQ2B-M Metric sizes Connection threads R/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

CNA

CNA63 or more 0.3MPa Graph x m 0.4MPa Graph c F 0.5MPa Graph v Load along rod retracted or extended direction m 0.3MPa Graph b F 0.4MPa Graph n m 0.5MPa Graph m F 3.3-6 How to Select Series CNA Selection Graphs Graph b Graph x 0.3MPa P < 0.4MPa 0.3MPa P < 0.4MPa 1000 1000 500 400 300 500 400 300 100 100 100 80 80 80 200 200 100 100 100 63 63 63 CL 80 80 80 50 50 50 40 40 40

Refrigerated Air Dryers Series IDF/IDU

Ventilation direction Ball valve Ventilation air outlet F C 40 Ventilation direction (When no symbol is specified.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/10mm stroke A (mm) B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional dimensions by stroke(mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +25 +40 +60.5 8 Series ZPT ZPT 20/25/32 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) ZPT 40/50 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) Applicable tube O.D.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Steel 1300 Series VFR5000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Plug-in: 2 Position Single/Double, 3 Position Closed Center/Exhaust Center/Pressure Center 2 position single: VFR510 -F(Z) 0 1 21 [25] 32 [39] 40 [40.5] 31 [36] 31 [36] 25 [24] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB SJ A B 32 [39] 40 [40.5] SY 5 x 3/8, 1/2, 3/4 EA, EB port = 1/2 in case of 3/

MXS

adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7) (mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

MXS Series Air Slide Table

F A F Lr 6 6 6 Lr=24mm 0.020 0.04 0.04 0.015 0.03 0.03 Table deflection mm Table deflection mm Table deflection mm MXS6-10 MXS6-20 MXS6-30 MXS6-30 MXS6-20 MXS6-10 MXS6-40 MXS6-50 0.010 0.02 0.02 MXS6-20 MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 0 10 20 30 40 0 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 8 8 8 Lr=50mm 0.020

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106

SMC Pneumatic Clean Series

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36

MHZ

MHZ2-6D/MHZA2-6D MHZ2-25D/MHZL2-25D MHZ 100 Pressure 0.7 MPa Pressure 0.7 MPa 6 MHF Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa MHL 4 0.5 MPa 0.5 MPa F 60 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa MHR 0.3 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 0.3 MPa 0.2 MPa 2 0.2 MPa 0.2 MPa MHK 20 MHS 0 10 20 30 0 20 40 60 80 100 F Gripping point

Secondary Batteries

, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

MHZ

MHZJ2-6D/MHZAJ2-6D MHZJ2-25D/11-MHZ2-25D 100 Pressure 0.7 MPa Pressure 0.7 MPa 6 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) Gripping force (N) MHZ 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa F 4 0.5 MPa 0.5 MPa 60 0.4 MPa 0.4 MPa MHF 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 0.3 MPa 0.2 MPa MHL 0.2 MPa 0.2 MPa 2 20 MHR F 0 10 20 30 0 20 40 60 80 100 MHK Courtesy

LEC-OM02704CN

F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

AC Servo Motor Driver (CC-Link Type ）

, [b] to [f]).