Table of Contents

E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

Table of Contents

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

5-Port Solenoid Valve

23 46.1 81.1 5 Refer to panel fitting dimensions for details.

Compact Hydraulic Cylinder

Made to Order Change of Rod End Shape 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end shape pattern symbol A1 A2 A3 C0.5 30 30 30 30 D D D d d F Width across flats F F H H H A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more

Table of Contents

17.5 15 17.5 22 23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Table of Contents

G D Za -X 4-MM 20E1 E1 E4 E4 E3 E3 C E2 E2 F B Data G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2-LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) A 110 131 B 110 130 C 55 65 D 70 80 F 126 149 G H 37 37 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 90 100 J Mounting direction (1) Mounting

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

ZP

H F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

Made to Order

CS1 series Without auto switch With auto switch H 120 120 130 145 145 175 190 Bore size (mm) F 50 50 50 55 55 69 69 ZZ 245 245 266.5 291 291 357.5 387.5 F 50 50 50 55 55 H 120 120 130 145 145 ZZ 245 245 266.5 295 300 125 140 160 180 200 250 300 F H ZZ + Stroke (mm) MB series Bore size H ZZ 32 47 135 40 58 146 50 67 165 63 67 165 80 81 199 100 81 199 ZZ + Stroke H (mm) MB1 series Bore

Hydraulic

+ Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Air Slide Table

J I Pilot port 2 x M5 x 0.8 5.5 +0.025 0 3H9 ( ) depth 1.5 +0.025 0 3H9 ( ) depth 1.5 4.1 (Maximum screw-in depth) 3.5 23 18.9 2.1 (Minimum screw-in depth) B 14 34 3 21 32 17 B N x M3 x 0.512 F 15 2 x M3 x 0.5 thread depth 5 Cross-sectional view B-B N 2 1 x F 11 20 16 18 M 0.5 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) I J 5.5 Bottom view of MXQ6A-30Z Z ZZ (NN 1) x H G H 8.3 5.8

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

NCQ2/CQ2

-20DC-H -25DC-H -50DC-H -75DC-H x 80L x 85L x 90L x 120L x 145L x 170L 12.5 105 130 -100DC-H -100DC-H 180 90 95 C BQ2B32-10DC-H C BQ2B63-10DC-H -15DC-H -20DC-H -25DC-H -50DC-H -75DC-H -15DC-H -20DC-H -25DC-H -50DC-H -75DC-H x 80L x 85L x 90L x 115L x 140L x 165L 13.5 105 155 180 -100DC-H -100DC-H C BQ2B80-25DC-H 12.5 -50DC-H C BQ2B100-25DC-H 13 -50DC-H 170 x 170L With Rod End Lock (R ) Cylinder

Air Cylinder

A F NA F A H + Stroke CG3 JMB [mm] For details of the mounting nut, refer to page 63.

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Air Cylinder Series MB

Effective thread 10.2 f h 10.2 16 l H + Stroke A K A K F N C CJ1 With rod boot ZZ + 2 strokes S + Stroke H B CJP MM 2 x P G G MM In the case of w/o air cushion, it comes with rubber bumper.

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106