SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

KJ

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

Air Fittings & Tubing

See p.2.2-15. 2.2-10 Series KQ2 Male connector: KQ2H 01-32 KQ2H03-32 07-32 01-32 KQ2H03-32 07-32 Tube O.D. (inch) M Min. hole dia. Thread UNF NPT H (Hex.) (1) Weight (g) Part No.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

VZ100/300/500

: 600 mm Bracket (Mounting hole) (Mounting hole) (Mounting screw) (P , A, R port) (PE port) L plug connector (L) VZ52-L-01 M plug connector (M) VZ52-M-01 DIN terminal (D) VZ52-D-01 Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-32 33 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Base Mounted

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Modular F.R.L. Unit

AC20C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 Model Description AC25C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC30C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC40C G46-10-02 GC3-10AS G46-2-02 GC3-2AS AC40C-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS Round Square embedded type 1.0MPa Note 1) Note 2) Pressure gauge Attachments Accessories Round Square embedded type N.O.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

Series KP/KPQ/KPG

D2 A L2 H Connection threads Union Tee: KPQT, KPGT (M5) H (width across flats) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A Note 1) Applicable tubing O.D. mm Connection threads R (M5) Weight g L2 D2 M M L1 M L1 8 10 14 8 10 14 12 14 KPGT04-M5 KPGT04-01 KPGT04-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 KPQT04-M5 KPQT04-01 KPQT04

Series KP/KPQ/KPG

D2 A L2 H Connection threads Union Tee: KPQT, KPGT (M5) H (width across flats) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A Note 1) Applicable tubing O.D. mm Connection threads R (M5) Weight g L2 D2 M M L1 M L1 8 10 14 8 10 14 12 14 KPGT04-M5 KPGT04-01 KPGT04-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 KPQT04-M5 KPQT04-01 KPQT04

HRX-OM-W002

9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A

HRX-OM-X084

AL XXALM / Key Alarm number (Alarm number minimum AL01 LO W M LEVEL FLT / Key AL02 Alarm number MENU Key LO W LEVEL W RN / Key Alarm number (Alarm number maximum AL17 LO W FLO W FLT Key / 7.1 Alarm Notification HRR Series 7-2 HRX-OM-X084 Chapter 7 Alarm Notification and Troubleshooting 7.2 Alarm Buzzer Stop The alarm buzzer sounds to notify when the alarm signal is output.

HUMIDITY SWITCH, HUMIDITY SENSOR, Q62, 142.00000 lb

HUMIDITY SENSOR. CONDENSATION CHECKER. 103.00000 lb. Q62.

HUMIDITY SENSOR. CONDENSATION CHECKER. 103.00000 lb. Q62.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 15 16 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Single Unit How to Order (Single Unit) VX 2 0 21 01 VX 2 2 21 01 1 G 1 G 1 1 Normally Closed (N.C.)

SMC Electronic Switch Series Variations

ZS-20-A 16 NPN Open Collector 2 output w/o analog output, 3 revolution adjustment ISl IWith lead wire ZS-20-5A 17 NPN Open Collector 2 output w/o analog output, 200 revolution adjustment Note) When ordering switch with 5m long lead wire, indicate both part numbers. Ex.) ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(For manifold type 20, 21R) VP 1 SYJ7 2 5 M 01 Body ported VG VP SYJ7 4 5 M 01 1 Base mounted VQ 3 port Port size Body option Manual override VQZ : Individual exhaust for the pilot valve : Non-locking push style : Without sub-plate VZ 01: With Rc (PT)1/8 port sub-plate VS For sub-plate style, manifold type 41R, 42, 42R R Port P/E Port (With gasket and screws) M: Common exhaust for the pilot