Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: T (Panel Mount Adapter for w/

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve:

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Large Size Vacuum Module: Series ZR

switch for vacuum + + + PE (79.8) 1 A 85 1 PD 60 1 PS PV 143 (2000) 956 Large Size Vacuum Module: Ejector System Series ZR Note) 1 Dimensions for mounting bracket A Nozzle dia./1.8, 2.0 ZR1 1-K1M-E18 20 2 Dimensions for mounting spacer A Bracket A part no. : P3270153#1 (Standard accessory) Spacer A part no. : P3270156#1 For port exhaust Rc 1/4 exhaust port (EXH.)

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, DD, ZH NOZZLE SIZE 1.3, .11660 lb

ZP

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

Vacuum Module Series ZX

) M3 Note) Dimensions : For mounting bracket A : For mounting spacer 1. 892 Ejector System Series ZX Vacuum Module: Adsorption confirmation switch (ZSP1) ZX1-J2-P Spacer 1 (ZX1-S1) (For side mounting) Spacer 1: ZX1-S1 ZA 41 1 2 x R1.8 ZX 51 ZR A: Release flow rate adjusting needle with lock nut Adjusting needle (Mounting hole) ZM 2 x R1.8 (Mounting hole) 1 10 3.6 (Mounting hole) 17.6 ZMA

ZX

PS PV PD EXH PS PV 1(PV)(PS PD) M-3P PD Plug PE P3200152-12 (M2.5 x 28) PS Manifold base PV Philips screw Plug M-5P Table (1) Single unit In the case of manifold Quantity 2 1 1 1 1 Part no.

ZP

(mm) Model Flat (U) Flat with ribs (C) Deep (D) Bellows (B) Thin flat (UT) Thin flat with ribs (CT) ZPY2004 ZPY3507 ZPY4010 ZPY02 2 x 4 3.5 x 7 4 x 10 2 M4 x 0.7 M5 x 0.8 ZPY04 ZPY06 ZPY08 ZPY10 ZPY13 ZPY16 ZPY20 ZPY25 ZPY32 ZPY40 ZPY50 4 6 8 10 13 16 20 25 32 40 50 4, 6 tube M5 x 0.8 M6 x 1 ZX M5 x 0.8 M6 x 1 ZR M5 x 0.8 M6 x 1 M8 x 1.25 ZM 4, 6 tube M6 x 1 M8 x 1 ZH M6 x 1 M8 x 1 M6 x

ZP

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

Vacuum Ejector Series ZM

1 y u i o ZR ZM t t e e ZMA V V ZQ r r ZH !1 Left side Right side ZU ZL ZY ZF Clamp rod part no. (1) ZP Manifold part no.

13

(Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported type: Type D Box type (Built-in silencer) ZX Model

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.