High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below. Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). Table (1) ZQ13M--(-Q)Note 1) 4 Ejector assembly (1 pc. each in t and y is included.)

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2 (conforms to MIL-C-83503

How to Order Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch ®

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Valve stations are numbered from station 1 on the D side. Indicate the valves to be mounted below the manifold part number, in order starting from station 1 as shown in the drawing.

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

Intrinsically Safe Valve

2position 1 (P) port 1/4 N.C.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Table of Contents

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

Compact Manifold Regulator

t y u A B N 1.

3 Port Solenoid Valve Metal Seal Series VZ200 1

8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

Compact manifold regulator ARM5 Series

Semi-standard 1.

ZSE40/ISE40

female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc 1/8 IF Data E M5: M5 x 0.8 (Female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Option When optional parts only are required, order

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

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Display accuracy 2% F.S. 1 digit or less (at ambient temperature of 25 3C) Operation indicator light Green LED (OUT1: Lights when ON), Red LED (OUT2: Lights when ON) Output voltage: 1 to 5V Output voltage: 1 to 5V 2.5% F.S. or less (in rated pressure range) 5% F.S. or less (in rated pressure range) Linearity: 1% F.S. or less Analog output (Note 2) Linearity: 1% F.S. or less Output impedance

High Precision Digital Pressure Switch, Series ZSE40/ISE40

8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)