Compact Manifold Regulator Series ARM5

u A B N 1.

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Digital Pressure Switch

For example, when the output voltage is 1 to 5[V], the F.S. will be 5-1 = 4[V]. (Ref: 1%F.S. = 4 0.01 = 0.04[V]) F.S. (full span/full scale) This is a mode in which each function is set up, and is a separate menu from the pressure setup. If the setting needs to be changed, "F", each item can be set up.

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Common Supply Regulator

Domensions Plate thickness AR20M/30-MD: Max.3.5 AR40-D: Max.5 Dimensions Optional specifications Round type pressure gauge (Semi-standard:Z) Round type pressure gauge (with color zone) Standard specifications Round type pressure gauge Model P1 P2 P3 A BNote 1) C D F J K L1 H J H J H J AR20M-D 1/81/4 1/8 1/81/4 40 66.8 26.5 21 M28X1 26 2 9 37.5 62.5 37.5 63.5 37.5 63.5 AR30M-D 1/43/8 1/8 1

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I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Pressure Sensor for General Fluids

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Pressure Sensor

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

NARM Series

Assembly NARM2500 NARM3000 1 Body Aluminum die casting Chromate/Platinum silver painting Component Qty. Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M