Digital Flow Switches

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 -0.1 -0.3 12 18 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 -0.1 -0.3 16 25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 -0.1 -0.3 20 31.5 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 80 +0.084 0 -0.1 -0.3 25 35.5 100 Up to 750 20 to 750

Fluoropolymer Piping Equipment

LQ3T2A-R1 1/4" 1/8" 1/4" 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2 LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 LQ3T3A-R1 20 25 4 LQ3T3A-R2 1/8" 3/8" 10 9 11 33.5 32.5 14 2 LQ3T3A-R5 3/8" 1/4" 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20 4 LQ3T3A-R7 1/4" 1/4" 17 16 16 38 37 20 LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

SX

-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

AW

Size 20 30, 40 Description Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 Description None Mounting Bracket Float Auto Drain (N.C.)

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

3

PF3W 5 04 03 1T Remote sensor unit Integrated PF3W 7 04 03 AT M display Type Made to Order 5 7 Remote sensor unit Thread type X109 X128 X143 Seal material EPDM Integrated display Nil Rc Analog 4 to 20 mA 2 output type Note) Rated flow range (Flow range) N F NPT Piping material brass G Symbol Rated flow range Note) Applicable only for remote type with 04 20 40 11 21 ISO228 equivalent 0.5 to

VQ5000

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

2/3 Port Valve for Various

740 420 420 VXP2130-03 VXP2140-03 VXP2130-04 VXP2140-04 VXP2150-06 0.04 0.04 0.04 0.04 0.04 0.04 0.5 0.5 1.0 0.5 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.7 0.7 1.0 0.7 1.0 1.0 2.0 2.4 5.0 2.4 5.5 9.2 0.5 0.5 0.7 0.5 0.7 0.7 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38 0.4 0.4 0.7 0.4 0.7 0.7 1.9 2.4 4.2 2.4 5.3 9.2 46 58 100 58 130 220 Water, Air, Oil 1.5 3 8 Steam

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

2/3 Port Valve for Various

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

E-P HYREG

mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.