5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

Large Size Vacuum Module: Series ZR

How to Order Manifold 06 ZZR1 R ZR1 1 R1 1 1 RV ZR1 Port location Stations R16 R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.)

1.1

[Piping adapter] AP IDF Size Applicable Thermo-cooler Thread type and port size Symbol Material Quantity per set Female side B Male side A HRG001HRG002HRG005HRG010HRG015NPT 1/2 R 1/2 601 Copper alloy 2 HRG010HRG015603 NPT 3/4 R 3/4 Note) Refer to page 33 for dimensions.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

ISO Standard Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Electric Actuator

Left Right Nil S R Without cable Standard cable 2 Robotic cable (Flexible cable) R: Right 1 The standard cable should be used on fixed parts.

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

PF2A/PF2W

or less 60 mA or less Weight 45 g Maximum load current: 80 mA Internal voltage drop: 1 V or less (With load current of 80 mA) Maximum applied voltage: 30 V 2 outputs Output Note 5) specifications NPN open collector (PF2A300, PF2A310) Switch output Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (With load current of 80 mA) 2 outputs PNP open collector (PF2A301, PF2A311)

Digital Flow Switch (Integrated display type)

1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.

Digital Flow Switch

For the analogue output type, 5 V or 20 mA is output when [on], and 1 V or 4 mA is output when [oFF]. Press the button.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

4 mA 20 mA 750 kPa Flow [L/min] Output 150 Rated flow [L/min] Min.

48

voltage 40 mA or less 2.5 to 40 mA Load current 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)]

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m)

Rated Flow Range: 10 to 1000 l/min, Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: -, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Rated Flow Range: 10 to 1000 l/min, Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Lead Wire and M12-M12 Connector, 3m, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Parallel Style Air Gripper: Wide Type Series MHL2

MPa 0.3 MPa 40 40 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 0.2 MPa 20 20 0 0 40 80 120 160 200 0 40 80 120 160 20 40 60 80 100 120 140 0 20 40 60 80 100 120 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-40D MHL2-40D 2 1 2 1 MHL2-32D MHL2-32D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa 300 300 Gripping force (N) Gripping force (N) Gripping force (

10

7 r !5 CJ1 CJP CJ2 JCM CM2 32 CM3 CG1 CG3 JMB MB MB MB1 MBW125 CA2 Component Parts CS1 No. Description Material Qty Note 1 Rod cover Aluminum die-cast 2 Trivalent chromated No.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.