Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9

SMC Pneumatic Clean Series

11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

Air Cylinder

) (n = 2, 4, 6, 8) 1 10 75 80 90 Different surfaces 20 55 75 80 90 Same surface 20 + 35 (n 2) 75 + 35 (n 2) 80 + 35 (n 2) 90 + 35 (n 2) Different surfaces D-A44C (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) O 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2) 90 + 50 (n 2) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 1 10 75 80 90 2 (Different

MHZ

Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed No setting No setting MHZ2-6 1 7.5 6 4 1 3 2 6.5 5 3 2 1 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting

MHZ

No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting MHZJ2-10 No setting No setting MHZJ2-16 3 2

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Common SUP , Common EXH SJ Porting specifications Side: 3/8, 1/2 Bottom: 3/8 (Option) Side: 1/2 EXH 1 11/2 A, B port P port SY 2 to 10 stations (With multi-connector/D-sub connector: 2 to 8 stations) AMC610-10 (Port size: R 1), AMC810-14 (Port size: R 11/2) (1) Applicable exhaust cleaners Stations Piping work is reduced.

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 3 38.1 23.3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2 x 2.6 (For mounting) 2 x 2.6 (For mounting) 23 23 23 23 2 x 2.6 (For mounting) 2 x 2.6 60.6 (For mounting) 27 Refer to page 375

Step Motor Controller

) Connector C 1 2 Actuator side (Terminal no.) (14) (18) 5.5 A1 B1 5 6 1 2 6.3 A6 B6 Connector A Connector D 15 16 (14.7) (30.7) L (11) (10) Connector A terminal no.

Electric Slide Tables

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Cylinder with Lock

n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Same surface 1 10 100 100 120 Different surfaces Same surface 2 20 55 100 100 120 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Different surfaces D-A44C n

5 Port Air Operated Valve Series SYA3000/5000/7000 1

P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) FT 6 7 7 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX5000 2 position single

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX3000 2 position single

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Aluminum High Vacuum Angle Valve

11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.