With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.