Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

2-Color Display Digital Flow Switch Series PFM

01/(N)02/F01 98 76 58 48 Width across flats 17 18 OUT1 OUT2 10.2 DC (+) DC () 43 1 51.5 (Max. 58.5) IN OUT (34.2) 13 1 IN 3 18 2 x port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 2 x 3.4 28 20 8 3 x 2.6 depth 5 PFM7S-(N)01L/(N)02L/F01L 88 58 48 18 OUT2 OUT1 10.2 DC (+) DC () 13 43 1 51.5 (Max. 58.5) (34.2) 1 IN 3 18 2 x 3.4 IN OUT Width across flats 17 68 2 x port size Rc 1/8, 1/4 NPT 1/8, 1/4 G

E-P HYREG ® Series VY1

VVEX2-2-5-02 VY1200-00-G 4 pcs. VEX1-17 1 pc. Nil Rc G F N NPTF NPT In the case of VVEXB, the 2 in the first digit of the valve station number is a dummy part number.

Flow Control Equipment

Air Flow/Effective Area Model AS12l1FM AS13l1FM AS22l1FM-01 AS23l1FM-01 AS22l1FM-02 AS23l1FM-02 6, 8 Tube O.D.

3 Port Air Operated Valve

Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size

5 Port Solenoid Valve

Note 2) Number of stations, 02 to 16 Thread type Nil Rc F G T NPTF N NPT 640 A Exploded View of Manifold VQC4000 Series List of Valves, Options, and Mounting Bolts Number of options Valve and options Bolt part no. Qty (pcs.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N S GN GS LN LS GLN Nil GLS -Z Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

KR

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

VZ5000

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

315 326 350 360.5 331 342 362.5 373 L1 L2 L3 L4 4-14-15 Body Ported 16 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ32Stations C Grommet (G) (35) n-C6, C8, C10, 02 (11) 33.5 2-4.5 mounting hole (5.5) C8: One-touch fitting for 8 C6: One-touch fitting for 6 (7.5) 24 DIN rail clamp screw (2.5) C10: One-touch fitting for 10 02: Rc 1/4 U side n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2

VSA4

VSA4320, VSA4420 Applicable valve Manifold weight general equation M = 0.66n + 0.75 (kg) n: Station VVSA430N Dimensions (mm) n L L2 256 L1 214 2 stations 326 284 3 stations Pilot hole 396 354 4 stations 466 424 5 stations 70n + 116 70n + 74 n stations VSA4130, VSA4230 VSA4330, VSA4430 Applicable valve 4-10.5 mounting hole Manifold weight general equation M = 0.87n + 0.95 (kg) n: Station

AC Servo Motor Driver (Pulse input type/Positioning type ）

(b) Star connection For the 3-phase (L1/L2/L3/neutral point N) star connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and N) among voltages at six locations, between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1) and between one of the lines and the neutral point (between L1 and N, L2 and N, or L3 and N). 7 33 7.

Speed Controller: Standard Type Series AS In-line Type

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.