IDX-OM-W028

Temperature 32 Pressurized Dew Point 10 Working Fluid Compressed Air Operating Range Inlet Air Temperature 580 Inlet Air Pressure MPa 0.151.0 Ambient Temperature 240 (Relative Humidity of 85% or less) Power source (Note 4) Phase Three Electrical Specification Voltage V AC200(50Hz) / AC200,220(60Hz) Operating current(Note 2) A 4.2 / 4.8 6.7 / 7.3 8.2 / 9.3 Power consumption(Note 2) W 1100

AC Servo Motor Driver (Pulse input type/Positioning type ）

Doc no. LEC*-OMY0114-A PRODUCT NAME AC Servo Motor Driver (Pulse input type/Positioning type MODEL/ Series LECSB2-T Series This product can be used by adding a dedicated file (pushing operation extension file) to the setup software (MR Configurator2TM: LEC-MRC2E). Please download the dedicated file from SMC website. LECSB2-T Series / Driver 1. Safety Instructions These safety instructions

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor output [W]/Size [mm] 750/80 Motor type AC servo motor200 VAC Encoder Absolute 22-bit encoderResolution4194304 p/rev Horizontal 135 Power consumption [W] *7 Vertical 150 Horizontal 15 Stnadby power consumption when operating [W] *8 Vertical 45 power [W] *9 Max.1100 Type *10 Non-magnetizing lock specifications 24 VDC Rated voltage [V] Power consumption at at20 [W] *11 Holding force [N

LEJ-OM002xx

300,400,500,600,700,800 900,1000,1200,1500 Work load [kg] Note2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100

MIST SEPARATOR

SPECIFICATIONS Model AFM20-A AFM30-A AFM40-A AFM40-06-A Port size 1/81/4 1/43/8 1/43/81/2 3/4 Fluid Air Ambient and fluid -5 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Min. operating pressure 0.05 MPa 0.3 m (FILTRATION EFECIENCY 99.9%) Filtration MAX.1.0 mg/m3(ANR)(0.008ppm) Note1 Note2 Oil mist density at the out side 1100 Flow rateLminANR

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

CG5-S

Improved sealing Models and Specifications Note 1) Pneumatic cylinder Hydraulic cylinder Operating pressure Ambient temperature Applicable cylinder nominal thread size Allowable eccentricity U Max. tension and compression N 80 210 1100 2500 6000 11000 Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Model M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5

CRQ2

With air cushion Rotation time (s/90) Rubber bumper Without cushion 0.25 x 100.2 to 0.7 10 0.39 x 100.2 to 0.7 15 0.12 0.2 to 1 40 0.025 20 0.25 0.2 to 1 40 0.048 30 0.40 0.2 to 1 40 0.081 40 ) Allowable kinetic energy with cushion Maximum energy absorption with optimal adjustment of cushion needle Weight Table (g) Standard weight Size 90 180 120 150 10 220 270 15 600 700 20 900 1100

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASF JIS Symbol Flow Rate and Effective Area ASP330F ASP430F ASP530F ASP630F Model 10 12 8 8 10 Metric size 6, 8 6 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Tubing O.D. 5/16" Inch size Flow rate (/min(ANR)) Controlled flow (Free flow) 180 600 750 1100 1190 330 350 Effective area (mm2) 9.3 11.6 17 18.4 2.9 5.2 5.4 Note) Flow rate values are measured at 0.5 MPa and 20C.

Table of Contents

ASF JIS Symbol Flow Rate and Effective Area ASP330F ASP430F ASP530F ASP630F Model 10 12 8 8 10 Metric size 6, 8 6 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Tubing O.D. 5/16" Inch size Flow rate (/min(ANR)) Controlled flow (Free flow) 180 600 750 1100 1190 330 350 Effective area (mm2) 9.3 11.6 17 18.4 2.9 5.2 5.4 Note) Flow rate values are measured at 0.5 MPa and 20C.

Hydraulic

25014 Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights Unit: g Cylinder stroke (mm) Male thread additional weight 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 63 80 100 180 200 220 240 260 280 300 320 340 360 10 330 350 370 390 410 430 450 470 490 510 610 710 52 480 500 520 540 560 580 600 620 640 660 760 860 52 860 890 920 950 980 1010 1040 1070 1100

IDU/IDF

50Hz 200AVC 60Hz 5.9 3.1 5.0 7.6 9.5 Power consumption (kw) Auto drain 2.1 3.3 380AVC 50Hz 2.2 3.4 415AVC 50 30 50 60 80 200AVC Circuit breaker (A) 380AVC 15 20 451AVC Water cooled Air cooled Condenser Refrigerant R22 R407C Air connection 6B flange 2 1/2B flange 3B flange 4B flange Drain connection (Rc) Rc 3/8 Rc 1/2 Auto drain ADH4000-04 ADM200-042-8 Weight (kg) 330 350 450 660 1100

A

www.stevenengineering.com I 5.9 AIR PREPARATION MODULAR TYPE MIST SEPARATOR SERIES (N)AFM T E C H N I C A L SPECIFICATIONS Port Size 18 34Rc R e m o v e s m o re t h a n 9 9 . 9 % of oil mist 0.3m filter element Q u i c k r e l e a s e m e t a l b o w l guard on some sizes Automatic or manual drain Model NAFM2000 NAFM3000 NAFM4000 Port Size 18 14 14 38 38 12 34 Flow Rate ln/min* 200 450 1100

MK

1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical force (N)=Pressure (MPa) X Piston area (cm2) X 100 Operation direction R: Rod side (Clamp) H: Head side (Release) Weight/Mounting Through Hole Unit: g Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

REGULATOR, ELECTROPNEUMATIC. 1100 Size Electro-Pneumatic Regulator. 235.00000 lb. 853.

REGULATOR, ELECTROPNEUMATIC. 1100 Size Electro-Pneumatic Regulator. 235.00000 lb. 853.

REGULATOR, ELECTROPNEUMATIC. 1100 Size Electro-Pneumatic Regulator. 415.00000 lb. 853.

Model: 11 (800 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 0 (Current Style 4~20mADC), Monitor Output: 3 (Switch Output PNP), Thread: F [G(PF)], Port Size: 1 [1/8 (1100)], Bracket: None, Cable Connector: S (Straight Style 3m), Pressure Display Unit: 4 (PSI)