Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] CF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL

Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.12～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9NL

Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9NL

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Water-cooledThermo-chiller

HEB HED Technical Data Related Products Temperature range setting: 68 to194F (20 to 90C) Cooling capacity:2 kW/8 kW/15 kW/30 kW Temperature stability: 0.54F (0.3C) More effective energy-saving through use of an inverter pump Power consumption Inverter type 0.5 kWh/h Facility water 0.32 gpm (1.2 L/min) International standards: SEMATECH S2-93, S8-95 SEMI Standard S2-0703, S8-1103, F47-0200

Series: NCDA1 (Standard w/ Magnet), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Series: NCDA1 (Standard w/ Magnet), Mounting: B (MX0, Basic), Bore Size: 150 (1 1/2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Series: NCDA1 (Standard w/ Magnet), Mounting: B (MX0, Basic), Bore Size: 200 (2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Series: NCDA1 (Standard w/ Magnet), Mounting: B (MX0, Basic), Bore Size: 250 (2 1/2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Series: NCDA1 (Standard w/ Magnet), Mounting: B (MX0, Basic), Bore Size: 325 (3 1/4"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)