0.4

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

Series VQ Base Mounted Metal Seal/Rubber Seal

Flat cable assembly In the same way as the 25 pin (standard) products, the terminal No.1 for is SOL.A at the 1st stantion, the terminal No.9 for SOL.B at the 1st station, and the terminal No.8 for COM.

Modular Design with Uniform Body Style

V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/

MNB

8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB GC GD J GL GL1 GR GE GF 8.5 10 12.5 17.5 22 25

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Electric Slide Tables

7 i y r w e #0 @9 @7 @8 @2 @0 u D A A D C-C D-D B-B @5 @4 !9 !1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Modular F.R.L. Units

3.5 29 AC25B-B 1/4, 3/8 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/4, 3/8 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/4, 3/8, 1/2 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 AC40B-06-B 3/4 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8

Compact Manifold Regulator Series ARM5

8 1 8 ARM1000 57 1 8 1 8 VEX1 1 4 1 8 ARM2000 136 1 8 1 8 SRH How to Order SRP ARM 1000 A1 5 01 G SRF Option Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting ARX20 Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

0.4

0 0 02 W 1 CE compliant CE compliant Nil Q Entry is the same as standard products.

VQ4000

1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106 10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363

VQ5000

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

AC Servo Motor Driver (CC-Link Type)

The station number that may be set is any of 1 to 64 in decimal. In the initial status, the station number is set to station 1. Driver Driver Servo amplifier X10 STATION No. X1 5 5 6 6 4 4 3 3 7 7 2 2 8 8 1 1 9 9 0 0 Set the units. (initial value: 1) Set the tens. (initial value: 0) POINT Be sure to set the station numbers within the range of 1 to 64.

AC Servo Motor Driver (CC-Link Type)

The station number that may be set is any of 1 to 64 in decimal. In the initial status, the station number is set to station 1. Driver Driver Servo amplifier X10 STATION No. X1 5 5 6 6 4 4 3 3 7 7 2 2 8 8 1 1 9 9 0 0 Set the units. (initial value: 1) Set the tens. (initial value: 0) POINT Be sure to set the station numbers within the range of 1 to 64.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 Description No. Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 @3 !9 @0 !7 @1 e r t !1 !2 @8 !6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w * Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

HRX-OM-W060

A 20 HRL Cooling capacity CH1 CH2 100 9 kw 1 kw 200 19 kw 1 kw 300 26 kw 1 kw Cooling method A Air-cooled refrigeration Piping thread type Nil Rc F G (Rc-G thread adapter set is included) N NPT (Rc-NPT thread adapter set is included) Power supply 20 AC200V/200-230V(50/60Hz) 3phase Fig. 2-1 Product model number HRL Series 2.1 Model Number of Product 2-1 HRX-OM-W060 Chapter 2 Name and Function

HEC_W-E

1 -8-3 TABLE 8-2 AVAILABLE MODE IN LEVEL 2 -8-4 TABLE 8-3 AVAILABLE MODE IN LEVEL 3 -8-5 TABLE 9-1 ALARM INFORMATION -9-1 TABLE 9-2 RESET OF ALARM -9-3 TABLE 9-3 ALARM CODE LIST -9-3 TABLE 9-4 TROUBLESHOOTING -9-5 TABLE 10-1 SIGNAL AND STYLE OF CONNECTORS -10-1 TABLE 10-2 POWER SUPPLY CABLE -10-2 vii Contents Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT