Air Slide Table Series MXQ

-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120 0 20 40 60 80 100 20 40 60 80 100 Load N (1N

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 Note) Note) 1322Note) Refer to the bottom view of MXQ12-40. 809 MXQ 1322Air Slide Table Dimensions: MXQ12 1322Axial piping (12): MXQ12-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

AFF

20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30 3BJIS 10k flange 40 4BJIS 10k flange 14-20-10 3 Main Line Filter Series AFF Flow Characteristics/Select the model taking the max. flow capacity into consideration.

Table of Contents

20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30 3BJIS 10k flange 40 4BJIS 10k flange 14-20-10 3 Main Line Filter Series AFF Flow Characteristics/Select the model taking the max. flow capacity into consideration.

2

Rc thread and G thread: 12 NPT thread: 1/2" (Maintenance space 100 mm or more) IDG60, 75, 100 IDG60A, 75A, 100A With fitting for purge air discharge (Semi-standard: P) Port size L 91 82 60 50 Purge air for dew point indicator Purge air discharge tubing port for dew point indicator 2.3 14 17 7 Applicable tubing O.D.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

42

Silencer box assembly: VVQ5000-75A (With gasket, screw) Type SU Specifications Caution Double check spacer with residual pressure exhaust VVQ5000-25A-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Handling Precautions Double check spacer part no. VVQ5000-25A1 5 Intermediate stop Drop prevention Can hold an intermediate cylinder position for an extended time.

MG

MGPL25-75A is selected.

Thermo-chiller

Oscillator Oscillator HRLE090 HRS012 HRS090 + Reduced by 0.13 m2 + 0.43 m2 0.37 m2 0.19 m2 965 mm 970 mm 500 mm 445 mm 377 mm 377 mm Globally compatible power supplies 50 Hz 60 Hz 50/60 Hz Power consumption reduced by 17% Energy saving 3-phase 200 VAC 3-phase 200 to 230 VAC 3-phase 380 to 415 VAC 3-phase 460 to 480 VAC Single-phase 200 to 230 VAC HRLE Series : HRLE090 : HRLE050 CAT.ES40-75A

MGP

MGPL25-75A is selected.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Includes bushing assembly (SY7000-70-1A) 3 pcs. 1 SY760--(-Q) Valve 1 3 2 SUP/EXH block assembly SY7000-75A(-Q) 3 End block assembly SY7000-56-1A(-Q) In common for D side and U side (Bushing assembly: Not available for SY7000-70-1A.) 4 Bushing assembly SY7000-70-1A 5 VZ1000-11-4DIN rail Refer to page 186.

1)MXQ12 (L)MXQ-BS12 (L)189.5291/41140.86121.4M8 x 1M4 x 1220.5111318.5M4 x 12

A

N O O F S W I T C H E S 2 Pieces S 1 Piece n n Pieces * Not Available with MXQ6 F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12

1)MXQ12 (L)MXQ-CS12 (L)59.5291/41122124M8 x 1M4 x 1220.5111318.5M4 x 12

1)MXQ12 (L)MXQ-CS12 (L)59.5291/41122124M8 x 1M4 x 1220.5111318.5M4 x 12