Compact Manifold Regulator Series ARM5

Bracket assembly n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket assembly n pcs.

Vacuum System Peripherals:

Nil L C CL CN Grommet type N 15 Connector type NPN open collector, double output No analog output, 3 turn-set NPN open collector, double output No analog output, 200 degree set NPN open collector, single output With analog output, 3 turn-set NPN open collector, single output With analog output, 200 degree set PNP open collector, single output No analog output, 200 degree set Manual override

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

0.55

speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 800 600 400 200 VF3140-03 0 1000 800 600 400 200 VF5144-04 0 With : when using steel piping Front matter 1 Cylinder Speed Chart @ Use as a guide for selection.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

r ti o n an e n d tio ge 95 ta 10 20 30 50 70 100 200 10.2 7.2 6.5 8.2 7.0 6.1 4.9 ro m mu xi Ma Note) The drawing shows the rotation range of the positioning pin hole.

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

CQ2

DC CQ2 Standard DC A A73 S 32 200 CDQ2 With auto switch Number of auto switches With auto switch (Built-in magnet) S n Auto switch 2 1 n Without auto switch (Built-in magnet) Mounting Refer to table below for selection of auto switch model no.

CJ2

Nil S N 2 pcs. 1 pc. n pcs. N Non-locking type C95 Manual release CP95 NCM Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

Thermo-chiller/Rack Mount Type

(Pending for UL Standards) 1000/1100 200/200 Watercooled refrigeration Anti-quake bracket4 Single-phase 100 VAC (50/60 Hz)/ 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800

Electric Actuators

T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 40 0.5 200 (0.067 + 0.067) 200 T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Table of Contents

In-line type How to Order JIS Symbol 1F 12 K 400 AS Option Body size Nil K N None Hexagonal lock nut Electroless nickel plated If more than one option is required, write option part numbers in the order of K, N. M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Thermo-chiller

Nil None A With caster adjuster-foot B With earth leakage breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Hygienic Design Cylinder Series HY

HYG20 HYG25 30 50 20st 20st 30st 30st 25 40 50st 50st 100st 100st 20 Lateral load (N) Lateral load (N) 150st 150st 30 200st 200st 15 20 10 10 5 0 0 100 0 200 300 400 500 600 0 200 100 300 400 500 600 Piston speed (mm/sec) Piston speed (mm/sec) HYG32, 40 HYG50, 63 90 160 80 140 25st 25st 50st 50st 70 120 100st 100st 60 Lateral load (N) Lateral load (N) 100 150st 150st 50 200st 200st 80 40

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Programless controller Step motor (servo 24 VDC)

LEFB16 LEFB25 LEFB32 Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700