0.5

or more 50 ms or more Error signal ON OFF *4 Output Maintenance signal ON OFF *4 ON OFF Power supply (Green) PWR Power supply (Red) ON OFF Static neutralization operation (Green) ION/HV ON OFF Incorrect high voltage (Red) ON OFF LED indicators Error (Red) ALM ON OFF ON OFF Maintenance (Green) NDL 1 Hz 1 Hz Maintenance (Red) ON OFF 1 Hz Ion ON OFF Fan*2 ON OFF 1: Incorrect high voltage,

Multi-Axis Step Motor Controller

2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !9 @0 !3 !4 y !

S Couplers

Liquid dripping: 0.02 to 0.77 cm3 at each removal Aeration: 0.1 to 2.7 cm3 at each removal DM KDM KB Socket valve Plug valve KR KA KQG2 KG KFG2 MS KKA KKA KP LQ MQR T Non-greased specification (standard) Allows smooth installation and removal even without grease O-ring: Fluorine coated Sliding parts of plug and socket: Fluorine coated is used.

Soft Start-up Valve

37 AN20-02 AV3000-mS-A 49 AN30-03 AV4000-mS-A 56 AN40-04 AV5000-mS-A 92 AN500-06 Silencer (Built-in) Space saving Energy saving When switching the main valve (exhaust R low speed air supply), the flow passage to port 3 (R) is closed with the main valve.

HRS100/150

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC Note 4) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow

53

Applicable model HRS-DI007 HRSH090-ll-l HRS 090 (Flying-out size) (314) Measurement range of electric conductivity 2.0 to 48.0 mS/cm HRS 100/150 Circulating fluid return port (263) Set range of electric conductivity target 5.0 to 45.0 mS/cm To circulating fluid return port o i Set range of electric conductivity hysteresis 2.0 to 10.0 mS/cm HRSH 090 HRSH 090 Operating temperature range (Circulating

The body of the MS series is stainless steel, making it possible to use this fitting in corrosive applications.Stainless steel material (SUS316), Simple connection/disconnection, Compact size for tight piping areas, Accepts many styles of plastic tubing, FITTINGS, STAINLESS STEEL, CONNECTORS, MS SS MINI FITTING, PX, MS THREADS ONLY, .01732 lb, ModelDescriptionApplicationNoteMS-5ULUniversal

The body of the MS series is stainless steel, making it possible to use this fitting in corrosive applications.Stainless steel material (SUS316), Simple connection/disconnection, Compact size for tight piping areas, Accepts many styles of plastic tubing, FITTINGS, STAINLESS STEEL, CONNECTORS, MS SS MINI FITTING, BX, MS 1/8INCH, .01225 lb, ModelDescriptionApplicationNoteMS-5ATHU-3Barb

PSE200.eng

Press the button to set. 5 ms [Default setting] 20 ms 160 ms 640 ms Error Name Error Display Error Type Troubleshooting Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Secondary Batteries

Auto Switch Specifications PLC: Programmable Logic Controller Auto switch model Applicable load Power supply voltage Current consumption Load voltage Load current Internal voltage drop Leakage current Response time D-Y7BW(V)L-900 24 VDC relay, PLC 10 VDC to 28 VDC 2.5 mA to 40 mA 4 V or less 0.8 mA or less 1 ms or less Operating positionRed light is ON.

2–4

In the case of cylinders with built-in magnets, unassembled auto switch mounting brackets are packed together when shipped. 11 Series CQM Auto Switch Specifications Auto Switch Common Specifications Reed switch Type Leakage current Solid state switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less None 1 ms or less Note 2) Operating time 1.2 ms Impact resistance 300 m/s2 1000 m/s2 Note1) Connector

A

or above (Pulse input) Counting Speed 20 Kcps External Power Supply 12V10%, 60mA Control Output CEU1-D: NPN (30VDC, 50mA) CEU1P-D: PNP (30VDC, 50mA) Output Mode Comparison/hold/one-shot (100 ms fixed) Supply Voltage 24VDC 10% Output Delay Time 5 ms max Power Consumption 10VA Weight 250g H O W T O O R D E R S E E N E X T P A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of

Compact Type

. = b contact) state auto switches such as D-F9G and D-F9H. 14 Series CXSJ Auto Switch Common Specifications Auto Switch Common Specifications Type Reed switch Solid state switch Leakage current 3-wire: 100 A or less; 2-wire: 0.8 mA or less None Operating time 1.2 ms 1 ms or less Impact resistance 300 m/s2 1000 m/s2 Insulation resistance 50 M or more at 500 VDC (between lead wire and case

Electric Actuators

MS-DOS is a registered trade mark of Microsoft Corporation. Pentium is a trade mark of Intel Corporation.

3 Port Solenoid Valve Rubber Seal Series SY100 1

VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order SY1 X200 Entry is the same as standard products. 4-3-15

VQ4000

F T (Metal seal with indicator light/surge suppressor) kit (D-sub connector) kit (Terminal block box) VQ4100 17 mS (Single) Built-in One-touch fittings for easier piping 100 million cycles According to SMC life test conditions VQ4200 12 mS (Double) Accuracy 3 mS Enclosure IP65 compatible Enclosure IP65 compliant Dusttight/Low jetproof type L S kit (Lead wire) kit (Serial transmission

VQ5000

Outstanding response times and long service life kit (Lead wire) F L (Metal seal with light/surge suppressor) kit (D-sub connector) VQ5100 32 mS (Single) Enclosure IP65 compliant Dust tight/Low jetproof type 100 million cycles According to SMC life test conditions VQ5200 17 mS (Double) Accuracy 3 mS Enclosure For applications which demand high speed, high frequency, long life

Proposals for Energy Saving

Pressure Momentary change P1 P2 Set values t (ms) t (ms) Time Anti-chattering function Devices such as large bore cylinders and high-flow vacuum ejectors consume a large volume of air when they operate, and this may cause a momentary drop in the primary pressure.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

rate range Rated flow range Minimum set unit Water 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 2 to 16 l/min 0.5 to 4 l/min 5 to 40 l/min 10 to 100 l/min 0.1 l/min 0.05 l/min 0.5 l/min 1 l/min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse 1 l/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms

Pin Clamp Cylinder Series CKQ/CLKQ

or less 2) 1.2 ms Operating time Note 1) Electrical entry: Connector type (A73C/A80C) and A9/A9V type: 1000 VAC/min.