Digital Flow Switch (Integrated display type) ( compatible)

Min. cycle time 3.5 ms Process data length Input Data: 6 byte, Output Data: 0 byte On request data communication Available Data storage function Available Event function Available Vendor ID 131 (0x0083) Device ID 9 Refer to direct parameters page 1 (page 75) -92No.PF-OMW0010-D 1: Please refer to the chart of measurement range of ethylene glycol aqueous solution on page 95.

100

6 !5 !1 !4 Component Parts No.

2-Color Display Digital Flow Switch Series PFM

Note 5) Set to 1.5 s (90%), can be changed to 100 ms. Note 6) Set to hystresis mode at the time of shipment from the factory.

Digital Pressure Switch

Other parameter settings Item Page Default setting [F 3] Digital filter setting Page 37 0 ms [F 4] Auto-preset function Page 38 Not used [F 5] FUNC terminal setting Page 40 Analog output [F 6] Fine adjustment of display value Page 42 0% [F10] Sub display setting Page 43 std (Standard) [F11] Display resolution setting Page 49 1000-split [F80] Power saving mode Page 50 OFF [F81] Security code

2-Color Display High Precision

Available response time settings 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Digital Pressure Switch

(See Figure on page 59) Switch output NPN or PNP open collector output: 1 output NPN or PNP open collector output: 2 outputs Max. load current 80 mA Max. applied voltage 28 V (NPN output) Residual voltage 1 V or less (at 80 mA load current) 4 ms or less (with anti-chatter function: 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms, 10 s, 30 s or 60 s selected) Delay time Short circuit protection Provided

PF-OMM0004_C

) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H

Table of Contents

5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

Valve Single Unit

124 to 1-6-138.)

Valve Single Unit

124 to 1-6-138.)

C95Series

Output r8lponse Grommet Grommet Grommet Lead wire entry 1 mS or less 1 mS or less 1 mS or less " ~ ResponseUme ... ...

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

2-Color Display

Available response time settings 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms Principle This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

DOC1023125

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

7ND9071en

10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

Valve Single Unit

124 to 1-6-138.)

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

In case of ZQ1000M-E G-00, the overall length is 112. 5 6 5 6 5 6 5 6 Circuit diagram PE PE Left Right PS PV PD PD V V V 5 6 5 6 5 6 E F E F E F V ZQ1000M-K1 ZQ1000M-K2 ZQ1000M-J1 -FZQ1000M-Q1 24 Series ZQ Dimensions Fittings / Fitting type filter dimensions after installation V port Applicable tubing O.D.: 6 Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum