15

Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy e Motor mounting position r Motor type t Lead [mm] y Stroke [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Nil In-line R Right side parallel L Left side parallel Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A + Stroke 7-6-17 18 Series CQ2/CDQ2 Dimensions: 63 to 100 Both Ends Tapped Style Basic style (Through-hole) Both ends tapped style: CQ2A/CDQ2A R R O1 thread Bore size (mm) R O1 63 80 100 M10 x 1.5 18 22 22 M12 x 1.75 M12 x 1.75 H thread effective depth C Q F 2-P 4-N Through-hole 8-O counterbore U (Port size) I D 22 11 M E Z Minimum lead wire bending radius 10 Auto switch D-A7, A8 Courtesy

C85

1 y q r e i !2 o !

C85

1 y q r e i !2 o !

MGP

2 @2 r o e @4 !0 y !3 12, 16 under 50 stroke 12, 16 over 30 stroke !5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !

Compressed Air Cleaning Filter Series

AMD80/81/90/91/100 IN OUT Component Parts/Material Model AMD800/810/90/100 SGP-E, SS400 SGP-E, SS400 AMD801/811/91 Note No. Description 1 Filter case 2 Cover SGP-E, SS400 SS400 Replacement Parts Model No.

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10 siations) D side (2 to 10 statiom) Both sides (2 to 20 stations) Supply/Exhaust block assembly specilication Inlernal oilot sDecilication Iniernal piloLtsuiltn silencer Extenal pilol specitication External oiloUBuilfin silencel 'When the blill n s en@r type F lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe

Digital Flow Switch (Integrated display type)

for 1 L, 10 L and 100 L 2010 0x07DA 0 R/W Display resolution U8 0 Y 0: 1000 resolution 1: 100 resolution -81No.PF-OMW0007-E Product individual parameters (continued) Index Sub Access 1 Parameter Data Data Initial value storage 3 Set value Remarks index type 2 dec hex 2020 0x07E4 0 R/W Reversed Display U8 0 Y 0: oFF (not reversed) 1: on (reversed) Zero cut-off range setting 1: Unit [%] 2030

New

w r w e e VXF26C<r r e q e q VXF26D<r w r w e q e q Component Parts Component Parts No.

Air Cylinder Series CM2

CM2 R 20 100 A A CDM2 20 100 A A M9BW R With auto switch Number of auto switches Mounting style With auto switch (Built-in magnet) Bottom mounting style A B 2 pcs. Nil S n Front mounting style 1 pc. n pcs.

MGP

WB Standard stroke (mm) Bore size (mm) Q R S T U VA VB X YY YL Z 50, 75st 200st 100 to 175st 50, 75st 200st 100 124 100 to 175st 52 64 174 210 75 90 140 166 M12 x 1.75 M14 x 2.0 24 28 28 11 198 236 52 72 128 148 200 220 54 47 92 85 128 121 156 188 180 210 80 100 50, 75, 100, 125, 150, 175, 200 MGPM (slide bearing)/Dimensions A, DB, E MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E DB

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.

NCQ8

0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.

Fluoropolymer Piping Equipment

49 58 47 48 16 10 36 22 22 LQ3F63 69 55 56 LQ3F64 94.5 90.2 84 W M (R) Q P N (E, E) H L1, L1 T L2, L2 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension (R): I.D. of JIS flange necessary to mount this product.

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

Electric Actuator

Motor (Servo/24 VDC) AC Servo Motor Model Selection Specific Product Precautions Motor mounting position: Parallel Motor mounting position: In-line How to Order LEY 25 100 B 2 A1 S2 S q w e r t y u i o !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VP7 98.2 (for E type) L5 7 L3 (L4) (5) L2 (Rail mounting hole pitch: 12.5) For external pilot specification L1 11 18.3 VQC (Pitch) P = 24 24.3 22.2 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 SQ 18.8 40.1 39.3 18.8 63.3 79.8 3/5 R 3/5 R A 4 A 4 A 4 18 A 4 A 4 39.3 1 P 1 P VQ B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 VQ4 + + One-touch fitting 2n1-One-touch fitting [4

Tie-rod Type Hydraulic Cylinder

stroke 63 116 12 10 11 80 208 65 30 106 234 80 127 16 13 11 90 229 80 32 116 255 100 137 20 16 12 100 253 100 35 123 276 1/5 stroke 125 137 20 16 12 100 255 100 35 123 278 160 155 24 20 12 108 283 120 38 131 306 403 CHA Series Dimensions Single clevis type: CHAC V T 2 x Rc P Cushion adjustment screw CDH9 GA GB 4 x J Air release Width across flats G MM R (max.) d W D E W a MA A K F NA NB U

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 e #1 @9 #0 i !0 !3 !1 !2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !