CLA 1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.
32 71 43 19 20 212 112 255 15 15 M14 x 1.5 56 Up to 1200 53 177 180 144 38 78.5 42 19 20 236 118 275 18 15 M16 x 1.5 (mm) Bore size (mm) Without rod boot With rod boot W K KA N P S MM l H 110 ZZ 222 e 75 f 40 h 133 ZZ1 245 125 140 160 1/ 5 stroke 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 110 228 75 40 133 251 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 120 246 75 40 141 267 20 34 34.5 M36
r r u u u Drain Drain Drain Parts list Material No.
1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional
Manifold Option Parts Interface regulator: ARBF2000-00-P-1 (Plug-in type) ARBF2000-00-P-2 (Non plug-in type) Individual SUP spacer: VVFS2000-P-01 02-1 (Plug-in type) VVFS2000-P-01 02-2 (Non plug-in type) Individual SUP spacer Interface regulator SUP port Individual EXH spacer: VVFS2000-R-01 02-1 (Plug-in type) VVFS2000-R-01 02-2 (Non plug-in type) Air shutoff valve spacer: VVFS2000-21A-1
125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401
VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n
A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual pressure release valve spacer (AZ503-82 ) A B 65 (37) 105 (77) 14 PA 12 PB B 1 95 (67) 65 (37) 12 PB 14 PA B 1 PA 5 3 R PA A 5 3 R P A SMC P R1 R2 SMC R1 R2 Dimensions inside ( ) are for sub-plate.
2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !
100 125 136 161 186 50 119 41 23 12.5 25 37.5 81 94 106 75 100 125 144 169 194 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10
SUP spacer assembly Body ported A, B port P port -+ -+ R R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications
One-touch fitting for 5/16" Note 1) P and R ports cannot be changed. Note 2) Use caution that O-rings must be free from scratches and dust.
Working Principle Diagram Power supply and error LED indication Power supply Output signal r Control circuit Input signal P e Pressure sensor w Atmospheric pressure solenoid valve q Vacuum pressure solenoid valve VAC. (Vacuum pump, etc.)
Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R (2) Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type P FR (2) FP Adjuster option Note
One-touch fitting for 5/16" Note 1) P and R ports cannot be changed. Note 2) Use caution that O-rings must be free from scratches and dust.
pulse multiplying factor denominator) PB09 VG2 Speed loop gain P, S PB10 VIC Speed integral compensation P, S PA08 ATU Auto tuning mode P, S PB11 VDC Speed differential compensation P, S PA09 RSP Auto tuning response P, S PB12 OVA Overshoot amount compensation P PA10 INP In-position range P PB13 NH1 Machine resonance suppression filter 1 P, S PB14 NHQ1 Notch shape selection 1 P, S PA11 TLP
MLGC Taper ring Steel ball CNG P q MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.
, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different
sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +