Table of Contents

Metric sizes 6 8 10 12 ASS Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 ASR (free) flow Effective area mm2 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

Thermo-con

Note 2) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.1 gpm (8 L/min), Ambient temperature 77F (25C). Note 3) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.6 gpm (10 L/min), Ambient temperature 77F (25C).

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

HRX-OM-M005

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +22C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

Thermo-chiller

fluid temperature: CH1: 20C/CH2: 25C at the device outlet. *6 Fluid flow rate to maintain the cooling capacity.

1

Conductor resistance /km, 20C 65 or less COM. COM. 13 (+) 13 () Voltage limit V, 1 minute, AC 1000 Positive common Negative common Insulation resistance M/km, 20C 5 or more Note) When using a valve with no polarity, either positive common or negative common can be used. Note) The minimum bending radius of the D-sub connector cable is 20 mm.

Air Fittings & Tubing

TISA01BU-20X4 Made to Order eThe value of the min. bending radius is at a temperature of 20C and O.D. variable rate 10% max.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

20C and when the rated voltage is applied.

Proposals for Energy Saving

Note 4) Indicates the bending value when the outside diameter rate of change is 10% or less at a temperature of 20C.

AS

(mm) Applicable cylinder bore size (mm) 6, 10, 16, 20 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Release button color: Light gray 4 6 8 10 12 AS121FP-M5 AS221FP-01 AS221FP-02 AS321FP-03 AS421FP-04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Specifications Air Grade 1 (1) Fluid Particulate generation grade Proof pressure (20C) Maximum operating pressure (20C) Minimum operating pressure Ambient

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow

KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.

V100

(Coil temperature: 20C, at rated voltage, without surge voltage suppressor) Note 2) This solenoid valve requires lubrication. Use turbine oil Class 1 (ISO VG32).

Polyurethane Tubing Series TU/TIUB  — 20 m roll  — 100 m roll Model/Specifications For general pneumatic tubing — Option — Manufactured upon receipt of order (Please consult with SMC.) Flexible Tubing size Polyurethane tubing Metric size (Series

The value of the minimum bending radius is measured at the temperature of 20C as shown in the figure below. Fluid Air/Water Max. operating pressure at 20C 0.8 MPa Burst pressure Refer to the burst pressure characteristics curve. One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Applicable fittings Bend the tube into U-form at a temperature of 20C.

10

Note 3) The value at ambient temperature of 68F (20C) and when the rated voltage is applied. The value depends on the ambient environment. This is for reference. Note 1) Apparent power: The value at ambient temperature of 68F (20C) and when the rated voltage is applied.

Fluoropolymer Tubing Variations

Fixed end At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameters rate of change is 5%. Max.

7

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

New

Subsonic flow : Flow greater than the critical pressure ratio Standard condition : Air in a temperature state of 20C, absolute pressure 0.1 MPa (= 100 kPa = 1 bar), relative humidity 65%. It is stipulated by adding the (ANR) after the unit depicting air volume.

energy saving effect

in the users equipment: 25 kW Power supply: 200 V 60 Hz Circulating fluid flow: 125 L/min@0.5 MPa External piping: Bypass piping + Heat load 21 Conditions 20 19 25 kW load Heat load fluctuation (0 kW 25 kW) 0 kW load 0 10 20 30 40 50 Time [Minute] Applicable to an ambient temperature of 20C.