INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual

CNA

MLGC Taper ring Steel ball CNG P q MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.

CP95

50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Intermediate strokes are available.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CNA

1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

3 Port Air Operated Valve Series SYJA300 1

) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8

SYJA300

P 12 26 40 4 (3.6) (26) 54.2 40.5 48.8 (34) 54.5 54.3 1/8 (P, A, R port) 14.5 16 0.8 R P 18 1.8 (Breathing hole) 1.8 (Breathing hole) 20 12 23 15 1/8,1/4 (P , R port) 48 1797

Cylinder with Lock Series CNS

CLM2 CLG1 Taper ring Steel ball CL1 P f MLGC CNG R R MNB CNA CNS CLS A metal rod scraper Standard equipment CLQ Resistance against welding process spatter and other external contaminants is achieved by providing a metal rod scraper as standard. RLQ MLU MLGP Manual override for unlocking for emergency ML1C Even if the air supply is blocked or exhausted, lock release is possible.

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

CLS

(6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/

JXCx-OMU0026

JXC-OMU0026 (4) CIR-R / CIR-L / CIR-3 Pushing Push Position Step Movement Speed Position Acceleration Deceleration Threshold Area 1 Area 2 In-position Axis Selection Speed Force No. mode (mm/s) (mm) (mm/s2) (mm/s2) (%) (mm) (mm) (mm) (%) (mm/s) (%) Axis 1 CIR-R 100 100.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 100.00 100 0.0 0.0 0.5 0 Axis 3 -Note 1) 50.00 100 0.0 0.0 0.5 Axis 4 -Note 1)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

JXCx-OMT0002

JXC-OMT0002-C (4) CIR-R / CIR-L Area 1 Step No.

Programless controller Step motor (servo 24 VDC)

LEFS16A LEFS16B LEFS25H LEFS25A Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s] [mm/s2] [mm/s2] 0 10 200 5 200 20 200 12 200 1 20 300 10 300 30 300 20 300 2 30 400 15 400 40 400 30 400 3 40 500 20 500 50 500 40 500 4 50 600 25 600 60 600 50 600 5 60 700 30 700 80 700 60 700 6 80 800 40 800 100 800 80 800 7 100 900 50

VZ5000

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

Sine Rodless Cylinder Series REA

, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

SFOD-OMT0009CN

/ CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 () () 1) CIR-R CIR-L 1 2 34 (5) SYN-I Area 1 Step No.

SFOD-OMT0010

) Note 1) For CIR-R and CIR-L, Axis 1 and 2 are based on interpolation.