Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Series AP500

Ports 2 ports 3 ports 4 ports Code 2PW 3PW 4PW Porting Configuration r r e 1) Refer to gauge guide (P.94) for gauge specifications. Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

125

y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

CY1

100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Solenoid Valve Rubber Seal Series SY100 1

For R and U, DC voltage is only available.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R and U are for DC only.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

3 Port Solenoid Valve Metal Seal Series VZ200 1

300 (Lead wire length) S070 L side 18 15.4 Manual override (Non-locking) VQ 300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129 7 123 145 8 139 161 9 155 177 10 171 193 Symbol L1 L2 VFN Common exhaust:

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

Table of Contents

1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

Vacuum Unit

pages 11 and 12, and r on page 13.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R