Multi-Axis Step Motor Controller

3000 3000 0 85.0 50 100.0 0 0 0.5 Axis 2 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 1 Axis 3 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 > > > > > > > > > > > > > > Axis 1 SYN-I 500 100.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 2046 Axis 3 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 Axis 1 CIR-R 500 0.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 CIR-R 0 50.00

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

Stroke Reading Cylinder and Counter

Between case and signal ground: 500 VAC for 1 min.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

IDG

IDG100M IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 75 110 170 240 300 IDG60SM IDG75SM IDG100SM 50 100 150 Type V A regulator combined with the type M IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V IDG3HV IDG5HV IDG10HV IDG20HV IDG30HV IDG50HV

10

0 r !1 u w e t y i o !2 No.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Integrated Controller

Motor mounting position: Parallel Symbol Direction Size Nil Top side 16/25/32/40 R Right side L Left side Mounting2 Stroke [mm] 30 30 to to 500 500 Motor mounting position Parallel In-line 16 25 32 16 25 32 Symbol Type Nil Ends tapped3 Body bottom tapped For details, refer to the applicable stroke table below.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of 500 mm/s, use graph (2).

NCA1

Zinc chromated Tie rod Carbon steel 4 19 Rod seal NBR 1 20 Stroke (In inches and hundredths) Bore 500 600 800 Gland seal NBR 1 21 22 Cushion seal Urethane 2 Cylinder tube gasket NBR 2 23 NCA 500 RG Bore 500 600 800 Special options Nil XB5 XC35 XB5C35 Standard Oversized rod Coil scraper Oversized W/ Coil scraper NC A 500 26A 0400 D NCA 500 11 0400 B Special options Nil XB5 XB6 XB7 XB5B6 XB5B7

Vacuum Unit

pages 11 and 12, and r on page 13.)

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !