Made to Order , 350, 400 WA TF TN Nil PA P OL OB OA U Q T R S PW PB VB VA Bore size Over 100 st 200 st or less Over 25 st 100 st or less 25 st or less 124 124 124 128 Over 200 st 300 st or less 200 200 200 200 Over 300 st 300 300 300 300 32 40 50 63 7.5 7.5 9 9 63 72 92 110 11 11 14 98 106 130 142 48 48 48 52 6.7 6.7 8.6 8.6 44 44 60 70 24 24 24 28 96 104 130 130 78 86 110 124 30 30 40 50 110 118 146
(A port) P=19 21 22.5 9.5 R X R X P P 43 43 71.5 [72.8] 67.5 81.1 35 35 C6: MAX. 6 C8: MAX. 6.5 C6: MAX. 6 C8: MAX. 6.5 (Lead wire length) 300 80.6 [87.1] 300 (Lead wire length) (P/R port) 4-Rc (PT)1/4 57.1 [ ] for AC Other dimensions are the same as the grommet
Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 150 4.5 2.5 1.2 0.6 0.5 300 2.6 1.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.
Description Material Note Body Resin 1 Spool valve Aluminum/HNBR 2 Pilot valve assembly 3 VQZ100-12A (Standard) VQZ100-12B (External pilot type) 4 P, R port Resin/Aluminum r VQZ200/300 Metal seal type Rubber seal type q w e r q w e r N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) q w e r q w e r N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material No.
-02 0 1 1 8 9 M-type plug connector (M): VQZ3 2 (R)-M1-C6, C8, C10 0 1 1 8 9 43.3 [50.3] Approx. 300 (Lead wire length) 95.2 [97.4] 1/4 [4(A), 2(B) port] 90.2 18 38.5 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC L-type plug connector (L): VQZ3 2 (R)-L1-C6, C8, C10 0 1 1 8 9 DIN terminal (Y): VQZ3 2 (R)-Y1-C6, C8, C10 0 1 1 8 9 112.9 Max. 10 Approx. 300 (Lead
Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.
MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.
Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.
M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.
Fittings & Tubing Air Cylinders Rotary Actuators 23 For M5 10.5 (Pitch) P=16 18 1 20.5 10.5 35 (DIN 36.2) R P P R 57.1 [59.3] 35 (DIN 36.2) 21.5 R P P R 57.1 [59.3] 38 2 x 5.5 (For mounting) 2 x 5.5 (For mounting) 1/8 (P, R port) Approx. 300 (Lead wire length) Manual override L1 L2 4.5 L1 L2 4.5 Approx. 300 (Lead wire length) (Station n) (Station 1) (Station n) (Station 1) (Light/surge voltage
Grommet: G Conduit: C 300 V D D F Q F Q 280 300 VC Class H coil Broken line section C C G1/2 R R VDW VQ E E VX2 A H A H B B 2-P Port size 2-P Port size VX 2-M, thread depth N 2-M, thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K K VN
700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.
Pilot type (A) 2 (A) 2 Internal pilot 1 (P) 3 (R) 1 (P) 3 (R) (A) 2 (A) 2 o External pilot 2(A) 3(R) 1 (P) 3 (R) 1 (P) 3 (R) !0 Strainer X X X Component Parts 1(P) No.
VFN 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2] 58.7 66.1 76.1 Max. 10 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx. 300 (Lead wire length) 38.7 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 4-4-61 for dimensions with connector cable.
Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.
Zero speed detection ZSP ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC07]. OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.
External pilot Grommet L plug connector M plug connector G: Lead wire length 300 mm MN: Without lead wire M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) V 6 VDC S 5 VDC R 3 VDC Common specifications LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm Nil Positive common N Negative common Note) Put nothing for single grommet style
M5 Thread (VQZ100) CP With Port Plug (With Lateral Piping) S Y M B O L 1 NC -Metal Seal 2 NO -Metal Seal (VQZ2/300) 3 NC -Rubber Seal (VQZ2/300) 4 NO -Rubber Seal (VQZ2/300) M A N U A L O V E R R I D E Non Locking Push Type (Tool Type) B Slotted Locking Type (Tool Type) 5 Base Mounted B O D Y T Y P E E L E C T R I C A L E N T R Y L L Type Plug Connector with Lead Wire LO L Type Plug Terminal
External pilot Grommet L plug connector M plug connector G: Lead wire length 300 mm MN: Without lead wire M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) V 6 VDC S 5 VDC R 3 VDC Common specifications LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm Nil Positive common N Negative common Note) Put nothing for single grommet style
0 Manual override q w r e t y u i o !0 !