DOC1023126

4.68 4.97 5.25 5.54 EQY25 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 w ith lock 0.31 Product weight[kg] 1.60 1.67 1.84 2.10 2.28 2.45 2.63 2.80 2.98 EQY32 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 450 500 w ith lock 0.58 Product weight[kg] 2.55 2.66 2.95 3.23 3.63 3.92

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 772

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

JXCx-OMU0004

0.50.6[mm] L W 3.3 1 2 DIN LECP1 (LECP1D-) 13 No.JXC-OMU0004-A 3.4 1 LECP1DINLECP1D 2M4 DIN A DIN ADIN 2 M4 M4 ,SG 14 No.JXC-OMU0004-A D (100 ) 2mm 2 0V D 3 40 30mm 60mm ()60mm 0mm 16 LEH 10mm 25 () 30mm 60mm 60mm 15 No.JXC-OMU0004-A 4. 4.1 CN1 CN14 DC24V CN1 DC24V *5.

VK3000

(Standard), 2.3 W (Low wattage) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Surge voltage suppressor JIS Symbol Body ported Base mounted Neon bulb LED Indicator light At the rated voltage Mounting with VK300 Flow Characteristics/Weight Series VK300 can be mounted on the same manifold base VV5K3 of VK3000 series.

VK3000

) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Body ported Surge voltage suppressor Neon bulb LED Symbol Body ported Base mounted Indicator light At the rated voltage (B) 2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2

Sine Rodless Cylinder Series REA

, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

Rotary Clamp Cylinders

1 o t y u w q r !9 @2 @5 @4 !

17

6 w u !4 t !0 @4 @1 u w !2 !4 q !6 y @3 r !0 o @4 t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more 12 to 25 50 stroke or less 12 to 25 Over 50 stroke 50 or more Component Parts Component Parts No. Description Material Note Ball bushing Spacer Steel ball Plug Piston seal Rod seal Gasket A Gasket B No.

CL

Basic circuit Cylinder side Cylinder side [Example] 1) [Horizontal] W 3 port normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port normally closed 2) [Vertical] 1) [Horizontal] Load in the direction of rod extension Load in the direction of rod retraction Forward W W Action Forward SOL.A SOL.B SOL.C ON ON OFF Backward Regulator with check valve 0.5 s or more 0 to 0.5 s OFF

MWB

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 Ordering Example of Cylinder Assembly 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175

Refrigerated Air dryer Series IDU/IDF

220 280 265 275 305 380 300 350 280 295 340 415 325 375 332 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 100 VAC 200 VAC Power consumption (W) 220 to 240VAC 220VAC 240VAC JIS Symbol 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Circuit breaker (A) Note 3) Refrigerated air dryer Condenser Refrigerant Air connection Drain connection Auto drain Air cooling after cooler Rc 1/2 Rc 3/4 Rc 3/8 Auto

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism.

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Table of Contents

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Step Motor Controller

200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting hole

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 S3 S6 S7 AC servo motor (Incremental encoder) 100 W PNP 2pcs. AC servo motor (Incremental encoder) 200 W PNP 3pcs.