Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

6 No.

Mechanically Jointed Rodless Cylinder Series MY1

-X D 11.4 11.4 13.4 d 6 6 8 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 WX 38 48 54 Bore size (mm) 25 32 40 Individual -X Technical data 1073 Series MY1W Dimensions: 50, 63 MM M (LL) L B ! " C LD # $ % " J K PA YW QW LW PB Q& ' ( PG ) ! *+*%*"% , . . /*#! ( * * % # 0 W CH LH RR SS NE RR SS H HH NH PP QQ NC . 0 ! !% GA TT UU UU TT . GC . /*#! ( * * % # . /*#!

90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

Air Cylinder Series MB

6 !3 r !5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

Modular Type Air Filters Series AF

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal AC Metal

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Thermo-chiller

1 CH1 Circulating fluid return port CH2 Circulating fluid return port e r u y t CH2 Circulating fluid outlet q DI filter CH1 Circulating fluid outlet i !5 r t !6 !2 x 4 !3 w Parts List (170) No.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IOL_Autostart DI_C/Q Digital input only. DO_C/Q Digital output only. -75No.EX-OMX1011 IO-Link master unit parameters (continued) No.

Modular F.R.L. Unit

AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Float type auto drain N.C.

Electric Slide Tables

5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Stopper Cylinder

QA [mm] F 13 Tubing O.D. 6 B + Stroke R R 8 QB Stroke Q Bore size QA F Q QB QU QW 1.8 Stroke 20 Tubing O.D. QA F 13 KA KB Tubing O.D. 6 8 QB Stroke Q QU 32 6 7.5 20 13 38 60.5 40 6 8 24.5 13 42 68 50 8 9.5 26 16 50 82 29 1.8 Stroke 20 QW Tubing O.D. QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8