SV

-01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100

ZP

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

ZP

NBR (50), Conductive silicon rubber (50) Durometer Spring Reactive Force Dia.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

VQC

3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280 7.0 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4401 6.2 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal VQC4500 Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4501 3-position

Direct Operated

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz DC specification is not available.

Precautions 1

mass 0.55 (kg) (Axial foot style 32) Additional mass 0.09/50 (kg/50 st) Cylinder stroke 100 (st) 0.55 + 0.09 x 100/50 = 0.73 kg 1.

IDX-OM-M051

/2 R1/2 (50) 20 (143) 335 7122 670 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 3 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

S Couplers

/8 R1/8 R1/4 R1/4 R3/8 R3/8 R1/2 R1/2 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 NPT1/2 NPT1/2 Refer to the how to order on page 1 for the sleeve lock mechanism provided type.

Series AS-FM/AS-M/ASD-FM

/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R1/4 17 34.4 35.4 29.4 40.4 34 36 20.0 Reference dimensions for M5 and R threads after installation.

155

48 63 14 17 17 22 22 27 27 36 R1/4 R3/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

S Couplers Series KK/KKH/KK13

Series KK13 Series KK13 Series KK13 Manufactured by RECTUS AG 163 Variations Variations Series KK Series KK 165 to 173 Male thread type Port size Series M5 R1/8 R1/4 R3/8 R1/2 R3/4 KK2 KK3 KK4 KK6 Female thread type Port size M5 Series Rc1/8 Rc1/4 Rc3/8 Rc1/2 KK2 KK3 KK4 KK6 Nut fitting type (for fiber reinforced urethane hose) Applicable hose I.D.

KB

thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4

5 Port Solenoid Valve, Series VQC

6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280 (0.62) Exhaust center 7.0 Rubber seal VQC4401 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less 6.2 Metal seal VQC4500 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 Rubber seal VQC4501 7.1 0.38 1.9 0.38 2.0

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Air Cylinder Series MB

E1 L1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 30 40 50 65 65 100 20 22 28 40 40 46 I-03M I-04M I-05M I-08M I-10M I-12M Y-03MNote 1) +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10