High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Proof pressure Operating temperature 0 to 150C VC VDW Burst Pressure and Heat Resistance Performance VQ 4.0 VX2 3.5 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 VX3 2.5 VXA Pressure (MPa) 2.0 VN 1.5 LVC LVA 1.0 LVH 0.5 LVD 0 20 40 60 80 100 120 140 LVQ Temperature

Process Pump

Fluoropolymer Fittings Hyper Fitting/Flare type Series LQ3 Specifications LQ310 LQ320 LQ330 Model Material Max. operating pressure (at 20C) New PFA 1.0 MPa 0 to 150C 0 to 200C 3 to 25 1/8" to 1 1/4" Nut material: PVDF Operating temperature Nut material: PFA Metric Inch Applicable tube size Refer to Best Pneumatics No. 7 for further details.

Series PF2W Digital Flow Switch For Water

The flow velocity sensor heats up to approximately 150C. 4. Install a filter or mist separator on the upstream side when there is a possibility of condensate and foreign matter being mixed in with the fluid. The rectifying device built into the switch will be clogged up and accurate measurement will no longer be possible. [For water] 5.

NCA1

How to Order Mounting Bore Stroke N NC D A1 XB9 Standard Ex: NCDA1B 150-0400N-XB9 Low friction/Low speed Auto switch capable 6-15-23 23 Series NCA1 High Temperature Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) 14 to 300F (10 to 150C) Fluoro rubber 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard Fluid Max. operating pressure Min. operating

C92

Made to order Rod XB6 Heat resistant (Max. 150C) Single rod Double rod Stainless steel rod W R Not applicable to non-rotating rod (C92K) and models with built-in magnets. Stroke (mm) Refer to standard stroke table on p.1.12-3. Applicable Auto Switches/ Tie rod mounting Auto Switch Mounting Bracket Part No.

ISG

Body material in contact with fluid material Fluid Bellows Fluid entering part Non corrosive water/Air/Liquid/Inert gas Phosphor bronze Brass Stainless steel 316 Stainless steel 316 Fluids which do not corrode stainless steel 316 e.g. steam (150C or less) Ambient temperature: 80C or less.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Mass Symbol Specifications (kg) XB6 Heat resistant cylinder (150C) 20 25 32 40 50 100 80 63 Bore size (mm) XB13 Low speed cylinder (5 to 50 mm/s) 16.6 26.32 37.46 11.63 7.19 3.84 2.82 1.72 LB Type (Ball bushing bearing, Basic style) Basic mass XC4 With heavy duty scraper 20.58 33 45.98 14.17 9.38 4.87 3.79 2.44 LF Type (Ball bushing bearing, Front mounting flange style) XC6 Made of stainless

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Symbol Specifications 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Heat resistant cylinder (150C

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

mounting tap positions for slider 70 800 700 32 32 Non-lubricated exterior specifications 60 Outside of cylinder tube with hard chrome plating 600 50 Non-lubricated exterior specifications (with dust seal) 500 400 25 25 40 Interchangeable specification with CY16 30 20 20 6 6 300 Made to Order Click here for details 20 15 15 200 10 100 Symbol Specifications Head resistant cylinder (10 to 150C

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

-XB6 Heat resistant cylinder (10 to 150C)*2 -XB7 Cold resistant cylinder (40 to 70C) -XB9 Low speed cylinder (10 to 50 mm/s) -XC4 With heavy duty scraper -XC6l Made of stainless steel Double knuckle joint * Mounting bracket, double knuckle joint, and auto switch are shipped together with the product.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

Symbol Specifications XA Change of rod end shape XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion XB7 Cold resistant cylinder Not available with switch & with air cushion XB9 Low speed cylinder (10 to 50 mm/s) Not available with air cushion XB13 Low speed cylinder (5 to 50 mm/s) Not available with air cushion XC3 Special port location Not available with

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

Symbol Specifications -XAl Changeofrodendshape -XB6 Heat resistant cylinder (10 to 150C) -XB7 Coldresistantcylinder(40to70C)*1 Option: Ordering Example of Cylinder Assembly -XB9 Lowspeedcylinder(10to50mm/s)*1 -XB12 Externalstainlesssteelcylinder*2 -XB13 Lowspeedcylinder(5to50mm/s)*2 Cylinder model: CDM2C20-50Z-NV-M9BW -XC3 Specialportlocation -XC4 Withheavydutyscraper -XC5 Heat resistant

CYV

size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid Double acting Action 0.5 MPa Proof pressure 0.05 to 0.3 MPa Operating pressure range 1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) Leakage Maximum baking temperature 150C

S Couplers KKA Series Stainless steel type

S Couplers KKA Series RoHS Stainless steel type KQ2 Specifications KQB2 KS KX Fluid Water, Air Operating pressure range KKA3: 100 kPa to 1 MPa KKA4/6/7/8/9: 0 to 1 MPa Note 1) KM Proof pressure 10 MPa KF 5 to 150C (No freezing) Note) This product should not be used with steam. Ambient and fluid temperature M Symbol No grease is used.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XB6 Heat resistant cylinder (150C

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

MGF Theoretical Output MGZ Symbol Specifications OUT IN -XB6 Heat resistant cylinder (10 to 150C) (N) MGT -XB13 Low speed cylinder (5 to 50 mm/s) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) Rod size (mm) -XC4 With heavy duty scraper 1.0 0.9 0.8 0.7 0.6 0.5 0.3 0.4 0.2 -XC6 Made of stainless steel 314 283 251 220 188 157 126 0UT 314 62.8 94.2 20 8 -XC8 Adjustable

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C