Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: Z (Oil-free, Rc Thread)

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: D (200VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: G (Low Concentration Ozone Resistant, FMK Seal, NPT Thread)

Size, Body, Valve Type: 30C (Size: 3; Body Mat'l: Aluminum; Port Size: 1/4; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: F (24VDC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB

id_idw_and_ida_series_air_dyers

Standard dew point 22F (30C) Adsorbent set for standard dew point 4.7 4.7 6.7 6.7 ID-200S ID-300S ID-400S ID-600S Dimensions 240 240 320 320 9.4 9.4 12.6 12.6 520 615 850 961 Heatless Air Dryer Series ID AM150-N02 AM250-N04 AM250-N04 AM350-N06 Mist separator Model Compact and light weight without heater and electric control board 20.5 24.2 33.5 37.8 110V Single-Phase 60hz Bracket 6604113

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) K M Square embedded type pressure gauge (Option) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (Option) K M Square embedded type pressure

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C

Mechanical Valves Series NVM, NVFM, NVZNI

Td_i ACTUATOR SUB ASSEMBLIES NYTMZJV Pa.t# trYZil4SU Patl# Cam Lever Acetal vM-01c vM-o1c Cam Lever teel VM.O1 VM-OICS Cam Lever One-wav Acetal vM-02c vM-02c Cam Lever One-Way Steel vM-02c VM-O2CS Descrlptlon HOI|T Matorial M5 x0.8 Plunqer VM.OsD vM-05c Roller Plunoer In Line Acetal VM.06D vM-06c Roller Plunger In Line Steel VM.O6DS VM.O6CS Tooqle Lever vM-080 VM.O8C Push Button-MushroomvM-30c

High Vacuum Angle Valve, XL Series

Surface leakage Leakage that occurs between the deformable seal material and the sealing surface at room temperature (20 to 30C). This is read within a few minutes after the start of the test. Gas permeation This is leakage caused by diffusion through the deformable seal material.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 5 0 Intake air temperature C (Atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Electric Actuator

S8 40 400 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. + Driver type I/O connector ( Cable length Power supply voltage Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) Nil H Without connector With connector Nil 2 5 A Without cable 2 m 5 m 10 m ) ) ) ) ) ) ) ) ) ) ) ) ) ) Nil A1 A2 B1 B2 C1 C2 S1 S2 Without driver LECSA1-S; LECSA2-

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

Table of Contents

S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Electric Actuator

(Absolute encoder) Motor option AC servo motor S7 200 63 (Absolute encoder) Without lock Nil B With lock 1: For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Table of Contents

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

3 Port Solenoid Valve/

Pilot Nil Internal pilot R External pilot Voltage Safety limit switch/Wiring 5 24 VDC Nil G1/2 (Made by OMRON) M M12 connector (Made by OMRON) Electrical entry S1 M12 connector (Made by Rockwell Automation) D DIN terminal Y DIN (EN175301-803) terminal Refer to page 18 for details about type Y. With check valve (Only external pilot) Check valve Applicable tube O.D.