CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 I-G02SUS Y-G02SUS 20 20 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Thermo-chiller

Note q Nipple Stainless steel HRLE090 R1 2 For CH1 HRLE050 R1/2 [CH2 side] w Ball valve Stainless steel HRLE090 Rc1 1 For CH1 HRLE050 Rc1/2 t w e Different diameter tee Stainless steel HRLE090 Rc1 x Rc3/8 1 For CH1 HRLE050 Rc1/2 x Rc3/8 r Hexagon bushing Stainless steel HRLE090/050 Rc3/8 x Rc1/4 2 For CH1/CH2 t Pressure gauge HRLE090/050 R1/4 2 For CH1/CH2 y Nipple Stainless steel HRLE090

20

Connection thread H1 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 25.4 25 24.5 24.1 24 23.5 23.5 1 1.5 2 2.5 3 3.5 4 31.4 31 30.5 30.1 30 29.5 29.5 D R1/4 14 H1 A L1 Reference dimensions after R thread installation High efficiency nozzle: KNH [mm] Connection thread L1 A Width across flats Nozzle size Connection thread Part no.

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

Pressure Sensor for General Fluids

D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0006-D Revision history A: For B: Complete revision C: Contents revised in several places. D: Contents revised in several places.

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

SX

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

VCC

VCC13-00 45.90.1 38.40.1 230.1 1.2 to 2 hole 16.50.1 4 hole 4 hole Leakage detection port RETURN port 1.2 hole VNA Pilot port IN port VNB OUT port 30 R0.2 SGC 230.05 22.50.05 M26 x 1.5 3.8 hole SGH 240.05 220.05 VNC C1 VNH 30 30 30 VND 2.5 8.5 32.70.05 VCC VCC 40.50.1 TQ 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 649 VCC Series Dimensions

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-00 45.90.1 38.40.1 230.1 1.2 to 2 hole 16.50.1 4 hole 4 hole Leakage detection port RETURN port 1.2 hole Pilot port IN port OUT port 30 R0.2 230.05 22.50.05 M26 x 1.5 3.8 hole 240.05 220.05 C1 30 30 30 2.5 8.5 32.70.05 40.50.1 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 11 VCC Series Dimensions Single valve unit VCC12(D)-02(F) 38.7

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No

Valve Single Unit

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

Valve Single Unit

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

Plug-in/Plug Lead: Single Unit

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Pressure Sensor for General Fluids

A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 Lead wire and M12 connector ZS-37-A ZS-37-B -17No.PS-OMS0005-E Adapter with throttle ZS-31-X Model No. D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0005-E Revision history A: Contents are added. B: Contents are added. C: Contents revised in several places. D: Contents revised in several places.

PSxx-OMM0006CN

) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () -13No.PS-OMM0006CN-E NPN () () ()()( ) () ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005 V ) 30 ON-OFF ON () (P1LP1H P2LP2H)ON (30 ) () "digit" () 0 () SI ONOFF -14No.PS-OMM0006CN-E () () () () ON ON () (n1Ln1H n2Ln2H)ON (30 ) 30 (0FF)(ON)(OFF) (ON) () 5R.D.(5) (01 MPa 0.001 MPa 1/1000)

PSxx-OMU0002CN

/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5

4/5 Port Air Operated Valve SYJA3000 Series

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

Table of Contents

Body Ported VQ140 0.73 0.84 Series VQ1000 Single/ 3 position only VQ141 1.0 0.84 P. 2-4-36 P. 2-4-30 VQ240 2.3 Series VQ2000 Single only VQ241 2.7 P. 2-4-36 P. 2-4-30 VQ170 0.60 0.58 Series VQ1000 Single/ 3 position only VQ171 0.80 0.70 P. 2-4-74 P. 2-4-72 2-4-2 3 Manifold Option Option Individual SUP/EXH Built-in silencer DIN rail mounting style Elbow fitting for cylinder port D-sub connector

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

2-Color Display

(Refer to Copy function on page 10.) 5 Series ZSE30A(F)/ISE30A Dimensions Z/ISE30A(F) Piping 01 N01 / 25 8 9.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector M5 x 0.8 10 200.1 30 01: R1/8 N01: NPT1/8 1.5 Width across flats 12 C4H C6H N7H One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight 17.95 21.75 17.55 10.3 9.8 14