Valve Single Unit

AXT100-DS25015 030 050 L Terminal no.

Valve Single Unit

AXT100-DS25015 030 050 L Terminal no.

Thermo-chiller

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon

Air Cylinder

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

Series VS

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Flow Rate Characteristics 3-position pressure center (A) 4 (B) 2 VSR/S8-4 Seal 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Position 1 (P) 5 (R1) 3 (R2) C 3.10 3.60 3.10 3.60 3.10 3.20

VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

Table of Contents

L type plug connector is used for 3 position AS.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

VZ3000

VZ3220 Grommet (G), (H) VZ3220-M5 G H Manual override (Non-locking) (Lead wire length) Mounting hole for manifold G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ3220-L-M5 M plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CG5-S

Applicable bore size (mm) Snap ring A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 C type 3.2 C type 3.2 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7 4.8 16.6 12.2 1.5

CG5-S

Applicable bore size (mm) Snap ring l l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 C type 3.2 C type 3.2 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7 4.8 16.6 12.2 1.5

45

AXT100-DS25015 030 050 L Terminal no.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

45

AXT100-DS25015 030 050 L Terminal no.

VZS2000

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

mlu

LA LB LB LDH10 LDH10 LU LU L L Z + Stroke Z + Stroke RR RR ZZ + Stroke ZZ + Stroke (mm) (mm) LC 18 22 26 32 Applicable pin no.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.