48

Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.

Compact Guide Cylinder

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

Size: 05 (ODØ3/16" IDØ0.13"), Color: R2 (TR Red), Roll Length: 305 (1000 ft)

Size: 13 (ODØ1/2", IDØ0.33"), Color: R2 (TR Red), Roll Length: 305 (1000 ft)

Size: 11 (ODØ3/8", IDØ0.25"), Color: R2 (TR Red), Roll Length: 305 (1000 ft)

Size: 01 (ODØ1/8" IDØ0.08"), Color: R2 (TR Red), Roll Length: 305 (1000 ft)

Size: 07 (ODØ1/4" IDØ0.17"), Color: R2 (TR Red), Roll Length: 305 (1000 ft)

Size: 40, Motor Type: S6 [AC Servo Motor (Absolute Encoder) 100W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 1000mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: -, I/O Connector: -

Accuracy: Basic Type, Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: -, I/O Connector: -, Option: -

VQ7-6/7-8

VV72-P-03, 04 R1, R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19ASilencer box AXT512-26A 1 2 SMC SMC 223.5 211.5 183.5 171.5 140 PA B 80.5 120.5 PE PE PE PA P PE PE P 78 R2 R1 R1 R2 EA EB EB EA A Individual EXH spacer: VV72-R2-Rc3/8, 1/2 Individual SUP spacer: VV72-P2-Rc3/8, 1/2 R1, R2 individual EXH spacer: VV72-R2-04 2-Rc1/2 Reverse pressure spacer: AXT512-19A2-Rc3

Fluoropolymer Piping Equipment

LQ3E31-R1 LQ3E31-R2 LQ3E32-R1 LQ3E32-R2 LQ3E41-R1 LQ3E41-R2 LQ3E51-R1 LQ3E51-R2 LQ3E61-R1 LQ3E61-R2 LQ3E2A-R1 LQ3E3A-R1 LQ3E3A-R2 LQ3E4A-R1 LQ3E4A-R2 LQ3E5A-R1 LQ3E5A-R2 LQ3E5A-R3 LQ3E6A-R1 LQ3E6A-R2 6 x 4 3/8" x 1/4" 2 3 10 x 8 1/2" x 3/8" 4 3 8 x 6 3/4" x 5/8" 5 12 x 10 4 1" x 7/8" 6 19 x 16 5 Note) For details of the applicable tubing sizes, refer to page 945. 25 x 22 6 Note) For details

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 4 x 3 1/4" x 5/32" 3 x 2 4 x 3 3 x 2 8 x 6 6 x 4 6 x 4 4 x 3 10 x 8 8 x 6 12 x 10 10 x 8 19 x 16 12 x 10 1/8" x 0.086" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1P4A-R2 4 5-13 LQ1-5N13 LQ1-5B13 3-07 LQ1-3N07 LQ1-3B07 LQ1P5A-R2 5 5-19 LQ1-5N19 LQ1-5B19 3-11 LQ1-3N11 LQ1-3B11 Union Reducing LQ1U-R A side B side Metric size Model Size A side B side Insert pin/Name plate symbol Part no. Insert pin/Name plate symbol Part no.

4/5 Port Air Operated Valve SYJA3000 Series

) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

4/5 Port Air Operated Valve Series SYJA3000 1

port) (R1, R2 port) 5-2-28

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.