Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

Ethernet/IP Direct Connect, ELECTRIC ACTUATOR CONTROLLER, N31, 0.13 lb

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

ETHERNET/IP DC CONTROLLER, ELECTRIC ACTUATOR CONTROLLER, N31, 0.23000 lb

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

Electric Actuator

300 to 1000 300 to 2000 300 to 2000 100 to 400 100 to 600 100 to 800 200 to 1000 CAT.NAS100-87 Slide Table Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Series LER Symmetrical Type (L Type) Basic Type (R Type) In-line Motor Type (D Type) High Precision Type Basic Type Series LESHmR Series LESHmL Series LESHmD Series LERH Size Rotation angle () Size

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1000 500 100 10 1 10 100.4 50.4 10.4 1.4 0.5 100 10.4 5.4 1.4 0.5 0.4 Speed (mm/s) 150 7.1 3.8 1.1 0.5 0.4 300 3.8 2.2 0.8 0.5 0.4 Values will vary slightly depending on the operating conditions.

AZ1000

However under Japanese regulation, only MPa is available in Japan. 40 Specifications 1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect.

CV/MVGQ

Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 6 7 7 11 11 9 9 11.5 13.5 13.5 40 45 50 65 75 86 83 83 84 85 138 144 166 204 212 3.2 3.2 3.2 4.5 6 42 50 59 76 92 70 80 93 116 133 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 8 11 11 13 16 Bore

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

JXCx-OMT0005CN

1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) 2DRIVEON No.1 (2)(5)(10)(13) DRIVE No.

Modular F.R.L. Unit

(ANR) Flow rate L/min (ANR) AR25K Rc3/8 AR50K Rc1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500 5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) AR30K Rc3/8 AR60K Rc1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (

Modular F.R.L. Unit

Failure to follow this procedure can cause damage to the knob and the outlet pressure 0.1 0.1 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 2000 Flow rate L/min (ANR) 0 1000 3000 0 Conditions: Inlet pressure 0.7MPa may fluctuate. Outlet pressure 0.2MPa Pull the pressure regulator knob to unlock.

LEC-OM07605CN

PC_ _ ]) [] PC01 ERZ rev03rev200rev200rev 0 0 [rev] () 1000 . [Pr.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1000 Pressure [kPa] 1000 Pressure [kPa] Pressure [MPa] 600 580 900 10 1 .05 0.105 0 0 1 .0 100 0 105 100 100 105 105 Functions Sub screen setting function The display of the sub screen can be selected.

CA2

For Long Stroke Bore size (mm) 40 Stroke range (mm) RT RY 501 to 800 RY 601 to 1000 50 76 30 1001 to 1200 601 to 1000 63 1001 to 1200 92 40 751 to 1000 80 RT 1001 to 1400 112 45 751 to 1000 100 1001 to 1500 136 50 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 B B1 C AL D E F G H1 J K KA LD LH LS LT Without rod boot With rod boot 60 9.0 up to 500 20 to 500 30 27 22 44 16 32

CL

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Long stroke Bore size (mm) Stroke range (mm) 40 RT RY 50 to 100 501 to 800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600