Valve Single Unit

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Valve Single Unit

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

5-Port Solenoid Valve

(Note that 2-position double, 3-position, and 4-position valves cannot be used where single wiring has been specified.) * This also includes the number of the blanking plate assembly. * Since R2 type SI unit has 8 outputs, note that up to 8 solenoids can be accommodated. *1 The SY5000 manifold base is used for the bottom-ported SY3000.

VQZ100V-OMT0001

3(R2 3(R2 3(R2 R) R) R) R) 5(R1) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2

Flow Sensor Series PFMV

. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less Secure mounting of n pcs. (2 or more) switches (Vertical) 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) PFM PFMV PF2A PF2W PF2D IF 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

5

40 69 22 24 55 M14 x 1.5 12 +0.070 0 16 0.1 0.3 15.5 20 With Double Knuckle Joint RHC Y(MAX) RZQ ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (MIN) (mm) Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 Double Knuckle Joint Material: Cast iron Y-040B Material

Air Cylinder

M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 CM2 CM2 CM3 With Double Knuckle Joint CG1 (mm) Y(MAX) ND hole H10 Axis d9 CG3 MM JMB MB NX2 L R2 U2 A H Z MB1 CA2 Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 CS1 CS2 Double Knuckle Joint (mm) Y-020B/032B

VZA2000

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

K35-OMX0029

port R1 FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

IDX-OM-W028

EVAPORATION WITH LAMP THERMOMETER VENTILATION VENTILATION DRAFT AIR OUTLET BALL VALVE (F) AUTO DRAIN C DRAIN TUBE TERMINAL LENGTH:1m) (O.D.10, BLOCK J P K L2 N1 M 13 4x POWER SUPPLY ENTRY 911)[OPPOSITON] (WIRE H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550 135 0 290 388 680 414 IDU37E R11/2 360 855 IDU55E R2

180

z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I = 9.0 x 10-6 + 4.4 x 10-6 = 13.4 x 10-6= 0.13 x 10-4 (kgm2) Moment of inertia around Z