Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

Sine Rodless Cylinder Series REBR Direct Mount Type

operating pressure 10 to 60C Ambient and fluid temperature 50 to 600mm/s Piston speed Non-lube Lubrication 0 to 250st: +1.0, 251 to 1000st: +1.4, 1001st and up: +1.8 Stroke length tolerance 0 0 0 Direct mount type Mounting Standard Strokes Maximum stroke with switch (mm) Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150, 200, 250, 300, 350, 400 450, 500 15 1000 750

Guide Cylinder Series MGG

900st 1.5 800st 700st 1 600st st: Stroke (mm) 400st 500st 0.5 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM 100Stroke 4 (Slide bearing type) 3.5 3 Deflection Y (mm) 1300st 2.5 1200st 1100st 2 1000st 1.5 900st 800st 1 600st 700st st: Stroke (mm) 500st 0.5 400st 100st 200st 300st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

5 Port Solenoid Valve Series SQ1000/2000

150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

LJ1H

Positioning distance (mm) 1 10 100 750 1500 10 1.1 2.0 11.0 76.0 151.0 100 1.1 1.2 2.1 8.6 16.1 Speed (mm/s) 500 1.1 1.2 1.4 2.7 4.2 1000 1.1 1.2 1.4 2.1 2.9 Values will vary slightly depending on the operating conditions.

25

Static Neutralization Characteristics e Potential Amplitude IZS40, 41 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 2000 2000 1750 1750 Potential amplitude (V) Potential amplitude (V) 1500 1500 1250 1250 1000 1000 1 Hz 1 Hz 30 Hz 750 750 30 Hz 500 500 250 250 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance

KT10

10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750

HRL

inlet Ventilation air outlet 715 40 or less 954 330 10 1538 A 1026 984 627 677 Anchor bolt mounting position (View A) For piping port sizes, refer to the Parts Description on page 330. 328 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Dimensions HRL300-Am-20 Ventilation air inlet Ventilation air inlet Ventilation air outlet 850 40 or less 1079 330 10 1839 A 1145 1109 700 750

ISO Cylinder

Action Single acting, Single rod Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure Rubber bumper Spring return: 0.18 MPa Spring extend: 0.23 MPa Ambient and fluid temperature Without auto switch: 20C to 80C (No freezing) With auto switch: 10C to 60C (No freezing) Lubricant Not required (Non-lube) Stroke length tolerance +1.4 0 mm Piston speed 50 to 750

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

MGC

The load kinetic energy can be obtained by the following equation: 5 a 1 Rush speed into cushion (mm/s) 100 50 200 500 750 M Also, selection can be made by using the graph above. Example) Find the maximum load weight when using a cylinder with 32, stroke 500 mm, with rear plate as a lifter at an average speed of a 300 mm/s.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 750, Max. Transportable Mass Range (Horizontal)(kg): 20.1 to 50.0, Max. Transportable Mass (Horizontal)(kg): 30, Max. Transportable Mass Range (Vertical)(kg): 2.1 to 5.0, Max.

Size: 25, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 50mm, Motor Option: B (w/Lock), Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length

Size: 32, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Motor Mounting Position: L (Symmetrical Type), Lead: K (8mm), Stroke: 150mm, Motor Option: B (w/Lock), Body Option: S (Dust-protected), Mounting: w/o Side Holder, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: L (Left Side Parallel), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)