3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override (2) 150/30 m/s2 Shock/Vibration resistance Dust proof Enclosure 12V, 24V DC 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B Coil insurance 1W DC (42mA), 0.5W DC (21mA) 24V DC 1W DC (

Power Clamp Cylinder

Wiring Diagram Black S1 Lood Blue () 4 3 S2 Lood 1 2 (+) Brown White Note) Both TURCK and P&F are common. 193 Series CKZT Caution 1. When mounted vertically, the maximum opening angle is different from the standard specifications. The opening angle is different from standard specifications depending on the arm offset, bore size and clamp arm. Refer to the following for details.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

JIS Symbol Not required Lubrication 2 position single Push type/Locking type (Tool required) Pilot valve manual override (A) 4 (B) 2 (2) 30/150 m/s2 Vibration/Impact resistance Dust tight Protection structure 1 (P) 5 (R1) 3 (R2) 12 VDC, 24 VDC Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Latching) (A) 4 (B) 2 (A) 4 (B) 2 Equivalent to class B Coil

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Mechanical Valves Series NVM, NVFM, NVZNI

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2

Multistage Ejector Series ZL112/212 1

1 EJECTOR MULTISTAGE Multistage Ejector Series ZL112/212 Energy-saving, large flow rate, 3 stage diffuser construction ZX Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) 1 stage perf stage perfor ormance mance 1 stage performance Vacuum pressure ZR Q1 Q2 Q3 ZM Q1 Q2 Q3 Maximum suction flow rate (l/min (ANR))

IIIIIII

HOW TO ORDER NVFil 250 -N02 02 S v"lrrs..i"" Tt L Rolter Material (01, 02, O6) : Acetal (Standard) NVFM 250(1) Cy1.0 NVZM 450(1) Cy0.55 S : Steel Pilot Supply 0 : Internal Pilot From "P" Port 1 = External Pilot Supply (Special Order Only) 00 : lhlve Body Only 0l = StandardCam Lever 02 = Cam Lever-One Way 05 = Plunger 06 = Roller Plunger, Inline 08 = Toggle Lever 30 = Push Button-Mushroom'

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time ms (at 0.5 MPa) Note 1) 10 to 50 (No freezing. ) 15 or less Max. operating frequency (Hz) 10 Non-locking push type, push-turn locking slotted type, push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Lubrication Mounting orientation Impact/Vibration resistance (m/s2

Rotary Table

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

Size: 32, Motor Mounting: R (Right Side Parallel Type), Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 250mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: S (Standard Cable), Cable Length: 2m

Size: 32, Motor Mounting: Right Side Parallel Type, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 250mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 2m, Controller Type: -, I/O Connector: -

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: S2 (100W Ouput, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: S2 (100W Ouput, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Left Side Parallel, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Left Side Parallel, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

For post-stoppage positioning and locking

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.