Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Capacity[g] 1 Body Aluminum alloy Anodic oxide coating GR-S-010 10 Ball screw Ass'y Linear guidde Ass'y 2 Ball screw Ass'y GR-S-020 20 3 Linear guide Ass'y 4 Table Aluminum alloy Anodic oxide coating 5 Side cover Aluminum alloy Anodic oxide coating 6 Dustproof cover Aluminum alloy Anodic oxide coating 7 Plate M Aluminum alloy Anodic oxide coating 8 Plate E Aluminum alloy Anodic oxide coating

PA3000/5000/PAX1000

First find the ratio of the discharge rate for fresh water when viscosity is 15mPa s from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15mPa s and the discharge rate of 200l/min in the required specification example are converted to the discharge rate for fresh water.

NCA1

AB E AO SA + Stroke AO Bore Size (in) MM KK A AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13 5.25 8.50 1.63 8.00 800 (8") 1.375 1-14 1.63 .75 4.25 .69 .25 2.000 8.50 3/4 NPT 5.13 3.25 7.13 8.75 1.63 8.56 MS2 Side lug style (S) LF + Stroke

CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

Process Pump Series PA3000/5000/PAX1000 Series PB1000

First find the ratio of the discharge rate for fresh water when viscosity is 15mPa s from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15mPa s and the discharge rate of 200l/min in the required specification example are converted to the discharge rate for fresh water.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

First find the ratio of the discharge rate for fresh water when viscosity is 15mPa s from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15mPa s and the discharge rate of 200l/min in the required specification example are converted to the discharge rate for fresh water.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Body size Body size 20 L/min 100 L/min Symbol Filtration area 750 mm2 Specifications Different diameters (IN side < OUT side) Different diameters (IN side > OUT side) Blue element Filtration: 10 m FKM/Oil free (Seal) Nylon Symbol X01 X02 X03 X04 X05 X06 5 7 1260 mm2 Applicable tubing O.D.

Digital Flow Switches

OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Digital Flow Switches, Series PF2A, Series PF2W

OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

FHG

companion flange S-block female threaded companion flange 1/2B, 3/4B, 1B A B C 074 105 149 74 m 105 m 149 m 1 1/4B, 1 1/2B, 2B 2 1/2B, 3B Length below flange neck (T dimension) M Micromesh Element Standard T dimension T dimension when shipped Symbol Length (mm) 310 380 450 520 590 385 485 585 685 560 650 750 850 Port size (Nominal size) Adjustment range (mm) Differential pressure indication

5 Port Solenoid Valve Series SQ1000/2000

of options 150 300 External pilot specification Supply/Exhaust block Blanking plate Individual supply spacer Individual exhaust spacer Supply block plate Exhaust block plate Built-in silencer Name plate Port plug Back pressure check valve SQ1000 0.25 0.18 450 600 750 150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

V

P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N S (N)VM1000 P U S H B U T T O N PT= Pre-travel OT= Over travel TT= Total travel S Y M B O L S (N)VM1000 T O G G L E S Y M B O L S (N)VM1000 P U S H B U T T O N S Y M B O L S (N)VM1000 O N E W AY Courtesy of Steven Engineering, Inc. !

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

Compact Hydraulic Cylinder

CHDAW 40 100 M9BW With Auto Switch Number of auto switches Mounting style Built-in magnet Bore size 40 50 63 80 100 Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.