Series AP500

800 100012001400 160018002000 Flow rate (slpm, N2) 0.75 (19) AP9030 600 psig (4.1 MPa) Inlet pressure: 300 2.1 250 1.7 Max. 11.2 (284.5) Delivery pressure (MPa) Delivery pressure (psig) 200 1.4 4.00 (101.6) 150 1.0 5.38 (136.7) 100 0.7 HP LP 50 0.3 0 0.0 1.13 (28.7) 0 200 400 600 800 100012001400 160018002000 Flow rate (slpm, N2) 3.5 (88.9) AP9110 150 psig (1.0 MPa) Inlet pressure: 75 psig

Mechanically Jointed Rodless Cylinder Series MY1

MY3M Shock Absorber Specifications Piston Speed 10 16 to 100 Bore size (mm) RB 0806 RB 1007 RB 1412 RB 2015 RB 0805 Model Without stroke adjusting unit 100 to 500 mm/s 100 to 1000 mm/s 100 to 1500 mm/s (2) A unit 2.9 5.9 19.6 58.8 100 to 200 mm/s 100 to 1000 mm/s (1) Max. energy absorption (J) 1.0 Stroke adjusting unit L unit and H unit 6 7 12 15 100 to 1000 mm/s Stroke absorption (mm) 5

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Large Size Vacuum Module: Series ZR

AC voltage: S is not available for AC.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Electric Slide Tables

3 3 2 Lead 16: LES25J 2 1.5 2 2 1 1 1 1 0.5 0 100 200 300 400 500 0 0 0 50 100 150 200 250 300 350 400 450 0 0 0 100 200 300 400 500 0 50 100 150 200 250 300 350 400 450 Speed [mm/s] Speed [mm/s] Speed [mm/s] Speed [mm/s] 2 Series LES Cycle Time (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm/s 0.20 30 40 50 60 70 80 90 100 110 120 130 140 150 Stroke

VEX1

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

Air-hydro Unit

Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31/32/33 CCVL20/21/22/23 CCVL02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

C95

V (mm/s) C85 C95 Find the Cylinder Bore Size.

CATALOG VC10

Body Brass Body S. S.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Note 4) Piston speed is ranged from 50 to 500 mm/s. Standard model no.

TABLE OF CONTENTS

Body Brass Body S. S.

ITV

, Hyteresis Repeatability With 50% of signal input 1 0.8 1 Output deviation factor (% F .S.)

MY1

MY1HT50-600 Average operating speed a 700mm/s Mounting orientation ... Vertical mounting 2. Wall mounting P. 58 y 1. Horizontal mounting P. 26 z MY1HT50-600 x z x y Wd: Work piece (500g) 4. Vertical mounting Wc: MHL2-16D1 (795g) Wa: Connection plate t = 10 (880g) 3.

IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.