Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

LEC-OM071xx

DISCONNECT 11 Turn OFF the control and main circuit power supplies.

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y LQ2B4C-F LQ2B4B-F LQ2B4A-F LQ2B3D-F LQ2B3C-F LQ2B3B-F LQ2B3A-F LQ2B2F-F LQ2B2E-F LQ2B2D-F LQ2B2C-F LQ2B2B-F LQ2B2A-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 18.5 1/8" 18.7 4 19 34.5 19.9 6 12 18 21.5 1/4" 22 43 42.5 43 42.5 21.5 22.2 1/4" 5 26.2 22 9 18 24 25 24 3/8" 52 51 52 51 25 27 3/8" 6 21 33.1 28 11 22 30 29.5 32 1/2" LQ2B4D-F

0.4

F kit P. 572 P kit P. 574 T kit P. 576 L kit P. 578 M kit P. 580 Station 6 SOL.B Silencer (For EXH port) AN15-C08 Double check block VVQ1000-FPG-SOL.A 8 9 10 21 Station 7 SOL.B 22 SOL.A 6 19 SOL.B 23 24 11 Station 8 12 25 13 13 COM. to CYL port Connector terminal no.

MXS

3H9 2.5 deep +0.025 0 10 N -1 X F 2-M3 X 0.5 thread 5 deep 2 11 3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) X H G H 11 5.5 5.5 11 A B 6.5 3.2 7 7 12 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Cross section BB Cross section AA With auto switch Basic style MXS6-10 MXS6-20 MXS6-30 MXS6-50 VWith stroke adjuster MXS6-10AS MXS6-20AS MXS6-30AS MXS6-50AS

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Title not found

/8 M6 x 1 1/2 Hex 10-32 Thd. 1/2 Hex M6 x 1 1/2 M6 x 1 10-32 to M5 (F) EX-M6 (M-F) 92 10-32 to 1/8 (F) M6 to 1/8 BSPT (F) M6 to 1/8 (F) 1/2 1/8 NPT 11/16 13/16 Ref. 13/16 Ref. 5/16 9/32 5/16 1/2 5/16 1/2 7/16 Hex 45 1/4 .314 Major Dia.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

LEC-OM02904

TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN 3 ( 2 ) I/O USB 1.LECSS-S5 2.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

MNB

15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.

MNB

15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.