SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

VFS

Junction cover Stations 1 4 1 4 4 Individual 5 02 2 stations Side Bottom Common 1 One-piece junction cover 6 D side For bottom ported, Rc 1/8 is only available. Multi-connector 7 08 8 stations Side Bottom Individual Individual 8 Max. 8 stations Option Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 3-8-8.)

ARM10/11

Option Metric size Inch size Nonrelieving 0.35 MPa IN side Bottom OUT side Symbol None Oil-free Symbol setting Note 1) Top Top IN side IN side Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side Bottom Nil 1 2 3 4 5 6 7 1 2 3 4 Symbol Symbol 4 5/32 6 1/4 6 1/4 4 5/32 6 1/4 6 1/4 4 5/32 4 5/32 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

ARM10/11

Option Metric size Inch size Nonrelieving 0.35 MPa IN side Bottom OUT side Symbol None Oil-free Symbol setting Note 1) Top Top IN side IN side Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side Bottom Nil 1 2 3 4 5 6 7 1 2 3 4 Symbol Symbol 4 5/32 6 1/4 6 1/4 4 5/32 6 1/4 6 1/4 4 5/32 4 5/32 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

V

B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5 13.8 5.5 ZP32U U32 32 35 4 15 10 14.5 4.5 ZP13B B13 13 15 4 13 14.2 18.5 8.7 19 7.5 ZP40U U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15

S

8 050 1/2 075 3/4 100 1 125 1 1/4 40~140F (5~60C) Ambient Temperature With Thread B W/O Thread IEC Standard IP67, JIS0920 (Water Proof, Oil Proof) Housing S T R O K E Bore Size Stroke mm (inch) inch 6 (1/4) 1/4, 3/8, 1/2, 3/4 10 (3/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 15 (5/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 D I M E N S I O N S N O S E M O U N T: NCJPB S Y M B O L S S Z With Auto Switch A C D F GA

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

0.4

7 (14) 11 (20) D side 2 6 6 (12) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

5 Port Solenoid Valve Series VQZ1000/2000/3000

, 5(R1), 3(R2) port] (8) (5.5) 49.9 150.3 [154.7] 20.5 24.4 36.6 36.4 36.4 136.8 [141.2] (30) 1 P 5 3 R1 R2 P 1 5 3 R1 R2 30 18 B B B B B B B 21 21 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 (35) (4) 68.4 [70.6] A A A A A A A (DIN rail) 34.5 4 x 4.5 (For mounting) 12 10 8 6 4 2 0 + + + + + + + (DIN rail clamp thread) PE port M3 x 0.5 (External pilot port) 59 [62.8] 4 (Pitch) P =

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

KB

Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

Compact 5-Port Solenoid Valve

4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

CA2

4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4

Fieldbus System

2 B 2 B 2 B 2 B 2 M12 communication connector (PROFIBUS DP) D-sub communication connector (PROFIBUS DP) 4 4 4 4 A 4 A 4 A 4 A 4 A SI unit Fieldbus Features 1 Series SY3000/5000 Pressure switch Valve piping direction variations M Piping is possible from 3 directions.

VFR

4 !