VCC

plug for 2 port valve VVCC12-10A-1 Piping port IN port Note 3) Fitting Part number (Mountable valve number) Stations Note 1) 02 04 06 08 10 12 14 16 18 20 40 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 U side (OUT port side) Description/Model 3 port valve Valve options Fitting 3 port valve (Sliding type) VCC13-00 D side Blanking plug for 3 port valve VVCC13-10A-1 Piping port

5 Port Solenoid Valve

3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 4 Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

SYJ3000/5000/7000

10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

Regulator

AR20-D AR30-D AR40-D AR40-06-D AR50-D AR60-D AR43P-270AS AR54P-270AS Note 4) (1) Bracket assembly Note 1) AR23P-270AS AR33P-270AS AR43P-260S (2) Set nut AR23P-260S AR33P-260S G46-10-01 Rc G36-10-01 G46-10-N01 G36-10-N01 Pressure gauge Note 2) NPT (Round type) G46-P10-N01-X30 Z : Both in MPa and psi G36-P10-N01-X30 (3) G G36-10-01 G46-10-01 G36-10-01-L Pressure gauge Note 2) Rc G46

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

•

(mm) ~-' Mounting thread( Application: Refer to listfJ) 02 92 16-.16 04 04 20-'20 06 ffl 25-25 08 "8 32-"32 10 '10 40-140 13 " 1 3 50-. 50 Pad type Vacuum Entry Lisl8 Vacuum Entry Mounting ~10 .16 m . 32 1'4O 1'5!1, N4 ~4 Nylon tube li ~.

HRX-OM-R039

Size Rated Rated Rated (to be onnected of leak current voltage current to the user's current equipment) Plug with ground HRSE012-A-10 3 cores x terminal (JIS C8303 Plug for the eceptacle for 15A and 125 V with dipole grounding electrodes) HRSE012-A-10-T 14AWG Shared 15mA 1-phase HRSE018-A-10 (3 cores x 2.0mm2) with 100 100V AC 15A 15A or V and 200 V (50/60Hz) 30mA (including HRSE018-A-10-

HRX-OM-R016

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-R016 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

Pressure Relief 3 Port Valve With Locking Holes

44 63 43 5.5 26 10 4.2 VHS5510 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510

A

~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 26VDC or less 28VDC or less 24VDC (10~28VDC) 24VDC (10~28VDC) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/4

HRX-OM-O021

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-O021 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

Filter Regulator

Part name specification type AW20-D AW30-D AW40-D AW40-06-D AW60-D (1) Bracket assembly AR43P-270AS Note 1) AW23P-270AS AR33P-270AS AR54P-270AS Note 4) (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 G46-10-01 Rc G36-10-N01 G46-10-N01 Note 2) Pressure gauge NPT (Round type) G36-P10-N01-X30 G46-P10-N01-X30 Z : Both in MPa and psi (3) G36-10-01 G46-10-01 G G36-10-01-L G46-10-01-L Rc

HRX-OM-R005

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-R005 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

HRX-OM-W058

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.