REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

25 Stroke range 1 to 29 1 to 49 Stroke range 32 to 100 1 to 99 Part No.: CQ2B50-57D 18 mm width spacer is installed in the standard CQ2B50-75D.

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

Bore size 20, 25 32, 40 50, 63 80, 100 Stroke range 16 to 49 21 to 99 31 to 99 41 to 99 CU Allowable kinetic energy Stroke range CQS Refer to "Selection" on page 789 regarding the allowable kinetic energy. CQ2 Part no.: RQB32-47 A special tube is manufactured for a 47mm stroke.

4/5 Port Solenoid Valve

DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 106.5 99

/

M 33 33 36 36 L 72.5 80.5 92.5 99 M 51.5 51.5 54 54 L 73.5 81.5 93.5 100 M 68.5 68.5 71 71 N 56.5 56.5 59 59 L 72.5 80.5 92.5 99 M 103.5 103.5 106 106 N 72.5 72.5 75 75 1/4, 3/8 1/2 3/4 1/1 28 35 43 45 7.5 8.5 9 9 5.5 6.5 6.5 6.5 26 33 40 45.5 1.6 2.3 2.6 2.6 14 17 22 22 67 75 87 92 52 60 68 73 77.5 85.5 97.5 104 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 42 Series VXE21/22/23 For Air/Water/Oil

CG1

27.5 49 49 74 74 40 40 65 65 15 24 90 30 99 124 124 30 115 115 50 50 75 75 40.5 40.5 65.5 65.5 15.5 25 90.5 33.5 100 125 125 33.5 115.5 115.5 54.5 54.5 79.5 79.5 43 43 68 68 18 29.5 93 38 38 104.5 129.5 129.5 118 118 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 27.5 27.5 100.5 D-G5 D-G5 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 30 30 100.5 125.5 125.5 116 116 D-K5 D-K5 51.5 51.5 76.5 76.5

Basic type / Direct mount type Series CY3B/CY3R

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5 21.5 107.5 103.5 108.5 45.5 41.5 46.5 84.5 88.5 83.5

Electric Actuator

Page 76 Model Selection (Clean Room Specification) Page 78 How to OrderPage 92 SpecificationsPage 93 DimensionsPage 94 Electric Actuator/Belt Drive Series LEFB Model Selection Page 2 How to OrderPage 26 SpecificationsPage 28 Construction Page 30 DimensionsPage 31 Electric Actuator/Belt Drive Series LEFB Model Selection Page 80 How to OrderPage 96 SpecificationsPage 97 Construction Page 99

0.4

30 mm. 23 Series VQC Plug-in Unit Base Mounted Series VQC1000/2000 S IP67 compliant kit (Serial transmission) For EX126 Integrated-type (Output) serial transmission system Construction M kit L kit T kit P kit F kit S kit Exploded View of Manifold Manifold Optional Parts Safety Instructions Specific Product Precautions VV5QC21 S kit (Serial transmission kit: EX126) (L4) (L3) (5.25) L2 L1 99

LVQ

LVQn n Dimensions (N.O. valve, double acting valve) 2 1 V S (mm) H A B C D E F G J K L M N P Q R W Model Vn Sn LVQ2 n LVQ3 n LVQ4 n LVQ5 n LVQ6 -Vn 2 1 V S 70 77 25.5 46 31.5 58 33.6 81 12 21.8 37 5 7 15 31.3 21 25.3 64 2 1 V S 83 95 28.5 57 34.5 69 45.4 99 16.5 32 50 6 7 20 37.2 25 31.2 82 2 1 V S 95 109 28.5 57 34.5 69 45.4 104.5 22 37.5 55.5 6 7 20 37.2 25 31.2 87.5 2 1 V S 130 141

LEC-OM07605CN

/60Hz [A] 0.9 1.5 2.6 3.8 AC170V264V 5% [kVA] 10.2 [A] 10.5 AC200V240V50Hz/60Hz [A] 0.2 AC170V264V 5% [W] 30 [A] 10.5 DC24V10% [A] (1) 0.3(CN8) PWM SSCNET/H(5) 0.222ms0.444ms0.888ms USB ((MR Configurator2)) (ABZ) 2 () STO(IEC/EN 61800-5-2) EN ISO 13849-1 3 PL dEN 61508 SIL 2 EN 62061 SIL CL2EN 61800-5-2 SIL 2 8ms(STOOFF) (3) (STO) 1Hz25Hz OFF1ms (MTTFd) 100 (DC) (90%99%

OMS0020

For Step Data Input Type control signal mode 0: Not executed 1-15: Step Data Operation Step Data number 20: Direct Operation 99: Return to Origin position For Pulse Input Type 0-3Step data No 99When returned to origin Binary digit (decimal) 0 to 99 ASCII hex "00" to "63" 24 (5) Operation Instructions Method Change Command "MD" Details This changes the controller operation mode from parallel

Air Preparation Equipment

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2

Refrigerated Air Dryer

AM Select accessories sold separately. 6 Refer to page 99.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

R B B B B B 63.8 (DIN: 65.1) 63 (DIN: 64.3) 122[126.4] 19 19 19 60 31.5 22 A A A A A 13.8 (DIN: 15.1) 1/4 (P, R port) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73[80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO) 106.5 99

COQ2BP

(mm) ,. 50 43.5 M8x1.25 MBK1.2S 99 6.6 67 9 76 89 18 Ml0X1.5 15 , (mm) 63 104.5 43.5 Ml0xl .5 18 M1Ox1.5 9 9 18 80 92 108 Ml0X 1.5 15 I 122 80 53.5 M12x1.75 22 M12x1.75 11 11 99 116 20 M16X2.0 134 21 Series CDQ2BP High Magnetic Field Resistance Head Side Flange: C002GP 0 -0 OM-C:J (mm) FT FII FX FZ Ll H C ; Bote . ... (mm) H Th read C Depth R N FD ,.

51

Table (3) Additional Mass [g] 1 50 100 150 200 250 300 10 20 31 4 25 44 9 32 61 13 40 99 14 50 99 22 63 148 24 80 207 35 100 Bore size (mm) Additional mass per 50 mm of stroke Switch magnet 20 4 Cylinder stroke (mm) Do not apply a lateral load over the allowable range to the rod end when it is mounted horizontally.

Air Cylinder

Caution Bore size (mm) E1 NN1 H ZZ 20 22 0 0.033 M22 x 1.5 24 99 DRod seal and scraper are not replaceable.