Table of Contents

Residual pressure relief 3 port valve AF + AR + [V] AC20B to 50B V AF + AFM + AR + [V] AC20C to 40C AW + AFM + [V] [V] + AF + ARK AC20D to 40D AC20B to 50B Residual pressure relief 3 port valve AC20C to 40C [V] + AF + AFM + ARK V1 (8) AC20D to 40D [V] + AWK+ AFM Note 5) When more than one attachment is required, order in alphabetical order.

Cylinder with Lock Series CNS

5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Membrane Air Dryer

(MPa) 0.7 0.7 Inlet air temperature (oC) 25 25 Inlet air saturation temperature (oC) 25 25 Ambient temperature (oC) 25 25 Dew point indicator purge air flow rate 1 L/min [ANR] {In the case of Inlet air pressure 0.7 MPa} 1 L/min [ANR] {In the case of Inlet air pressure 0.7 MPa} Regulator construction (Type V only) Relief type Relief type Port size (Nominal size B) 3/8, 1/2 1/4, 3/8 3/8, 1

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

Applicable Auto Switch Model

D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2

Electric Slide Tables

Lead 5: LES16K 3 Work load [kg] T1 = V/a1 = 220/5000 = 0.04 [s], Lead 10: LES16J 2 T3 = V/a2 = 220/5000 = 0.04 [s] T = T1 + T2 + T3 + T4 [s] T2 = L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. 1 0 = 50 0.5 220 (0.04 + 0.04) 220 0 100 200 300 400 500 T1 = V/a1 [s] T3 = V/a2 [s] Speed [mm/s] = 0.19 [s]

Cylinder with Lock Series CLS

A54 A59W 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 100 V Yes IC circuit Relay, PLC 100 V or less No 100 V, 200 V 2-wire 24 V PLC Terminal conduit 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) Solid state auto switches marked with are produced upon receipt of order.

Electric Actuator

D-M9NW(V)/D-M9PW(V)/D-M9BW(V) RoHS Model Selection LEJS LEJB Refer to SMC website for details about products conforming to the international standards.

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

Table of Contents

temperature (C) 25 25 25 1 l/min (ANR) {In the case of Inlet air pressure 0.7 MPa} Dew point indicator purge air flow rate Regulator construction (Type V only) Relief type Port size (Nominal size B) 1/4, 3/8 3/8, 1/2 2.23 (2.33) 2.26 (2.36) 2.99 (3.09) 3.14 (3.24) 3.29 (3.39) Type M Weight (kg) (With auto-drain) 3.34 (3.45) 3.37 (3.48) 4.10 (4.20) 4.25 (4.35) 4.40 (4.50) Type V Note 1) For

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V Grommet 24 V 2-wire 12 V Water resistant (2-color indication) Y7BA Solid state switches marked with are produced upon receipt of order.

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

MVGQ

Y7BW 3-wire (NPN) 2-wire Relay, PLC RB 5 V, 12 V IC circuit 3-wire (PNP) J 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon receipt of order.

Plate Cylinder

12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet

High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3

Vacuum Unit

V V V V p. 9 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function Single unit V V V p. 10 Without valve V V p. 13 Pressure switch for vacuum V Ejector System V V V With valve V V p. 11 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function For Manifold V V V p. 12 Without valve